2/19/10	12:08:18 AM	Program started normally
2/19/10	12:08:18 AM	Helium valve closed
2/19/10	12:08:18 AM	H2 valve closed
2/19/10	12:08:18 AM	BCl3 valve closed
2/19/10	12:08:18 AM	PH3 valve closed
2/19/10	12:08:18 AM	SiCl4 pre valve closed
2/19/10	12:08:18 AM	SiCl4 post valve closed
2/19/10	12:08:18 AM	Main Vac valve closed
2/19/10	12:08:18 AM	Bypass valve closed
2/19/10	12:08:18 AM	Bubbler valve closed
2/19/10	12:08:18 AM	Helium MFC set to  0.000000
2/19/10	12:08:18 AM	H2 MFC set to  0.000000
2/19/10	12:08:18 AM	BCl3 MFC set to  0.000000
2/19/10	12:08:18 AM	SiCl4 MFC set to  0.000000
2/19/10	12:08:18 AM	Bypass solenoid MFC set to  760.000000
2/19/10	12:08:18 AM	Tube furnace set to 0
2/19/10	12:08:29 AM	Program exited cleanly
2/19/10	12:09:12 AM	Program started normally
2/19/10	12:09:12 AM	Helium valve closed
2/19/10	12:09:12 AM	H2 valve closed
2/19/10	12:09:12 AM	BCl3 valve closed
2/19/10	12:09:12 AM	PH3 valve closed
2/19/10	12:09:12 AM	SiCl4 pre valve closed
2/19/10	12:09:12 AM	SiCl4 post valve closed
2/19/10	12:09:13 AM	Main Vac valve closed
2/19/10	12:09:13 AM	Bypass valve closed
2/19/10	12:09:13 AM	Bubbler valve closed
2/19/10	12:09:13 AM	Helium MFC set to  0.000000
2/19/10	12:09:13 AM	H2 MFC set to  0.000000
2/19/10	12:09:13 AM	BCl3 MFC set to  0.000000
2/19/10	12:09:13 AM	SiCl4 MFC set to  0.000000
2/19/10	12:09:13 AM	Bypass solenoid MFC set to  760.000000
2/19/10	12:09:13 AM	Tube furnace set to 0
2/19/10	12:09:14 AM	Bypass valve opened
2/19/10	12:09:15 AM	Bypass valve closed
2/19/10	12:09:25 AM	Program exited cleanly
2/19/10	12:10:12 AM	Program started normally
2/19/10	12:10:12 AM	Helium valve closed
2/19/10	12:10:12 AM	H2 valve closed
2/19/10	12:10:12 AM	BCl3 valve closed
2/19/10	12:10:12 AM	PH3 valve closed
2/19/10	12:10:12 AM	SiCl4 pre valve closed
2/19/10	12:10:12 AM	SiCl4 post valve closed
2/19/10	12:10:12 AM	Main Vac valve closed
2/19/10	12:10:12 AM	Bypass valve closed
2/19/10	12:10:12 AM	Bubbler valve closed
2/19/10	12:10:12 AM	Helium MFC set to  0.000000
2/19/10	12:10:12 AM	H2 MFC set to  0.000000
2/19/10	12:10:12 AM	BCl3 MFC set to  0.000000
2/19/10	12:10:12 AM	SiCl4 MFC set to  0.000000
2/19/10	12:10:12 AM	Bypass solenoid MFC set to  760.000000
2/19/10	12:10:12 AM	Tube furnace set to 0
2/19/10	12:10:13 AM	Bypass valve opened
2/19/10	12:10:13 AM	Bypass valve closed
2/19/10	12:10:15 AM	Bubbler valve opened
2/19/10	12:10:15 AM	Bubbler valve closed
2/19/10	12:10:16 AM	Helium valve opened
2/19/10	12:10:17 AM	Helium valve closed
2/19/10	12:10:17 AM	H2 valve opened
2/19/10	12:10:18 AM	H2 valve closed
2/19/10	12:10:18 AM	BCl3 valve opened
2/19/10	12:10:19 AM	BCl3 valve closed
2/19/10	12:10:19 AM	PH3 valve opened
2/19/10	12:10:20 AM	PH3 valve closed
2/19/10	12:10:20 AM	SiCl4 pre valve opened
2/19/10	12:10:21 AM	SiCl4 pre valve closed
2/19/10	12:10:21 AM	SiCl4 post valve opened
2/19/10	12:10:22 AM	SiCl4 post valve closed
2/19/10	12:10:28 AM	Bypass valve opened
2/19/10	12:10:28 AM	Bypass valve closed
2/19/10	12:10:29 AM	Main Vac valve opened
2/19/10	12:10:30 AM	Main Vac valve closed
2/19/10	12:10:31 AM	Bubbler valve opened
2/19/10	12:10:31 AM	Bubbler valve closed
2/19/10	12:10:33 AM	Program exited cleanly
2/19/10	12:12:18 AM	Program started normally
2/19/10	12:12:18 AM	Helium valve closed
2/19/10	12:12:18 AM	H2 valve closed
2/19/10	12:12:18 AM	BCl3 valve closed
2/19/10	12:12:18 AM	PH3 valve closed
2/19/10	12:12:18 AM	SiCl4 pre valve closed
2/19/10	12:12:18 AM	SiCl4 post valve closed
2/19/10	12:12:18 AM	Main Vac valve closed
2/19/10	12:12:18 AM	Bypass valve closed
2/19/10	12:12:18 AM	Bubbler valve closed
2/19/10	12:12:18 AM	Helium MFC set to  0.000000
2/19/10	12:12:18 AM	H2 MFC set to  0.000000
2/19/10	12:12:18 AM	BCl3 MFC set to  0.000000
2/19/10	12:12:18 AM	SiCl4 MFC set to  0.000000
2/19/10	12:12:18 AM	Bypass solenoid MFC set to  760.000000
2/19/10	12:12:18 AM	Tube furnace set to 0
2/19/10	12:12:19 AM	Bypass valve opened
2/19/10	12:12:20 AM	Bypass valve closed
2/19/10	12:12:20 AM	Main Vac valve opened
2/19/10	12:12:21 AM	Main Vac valve closed
2/19/10	12:12:22 AM	Bubbler valve opened
2/19/10	12:12:22 AM	Bubbler valve closed
2/19/10	12:12:25 AM	Program exited cleanly
2/19/10	12:15:54 AM	Program started normally
2/19/10	12:15:54 AM	Helium valve closed
2/19/10	12:15:54 AM	H2 valve closed
2/19/10	12:15:54 AM	BCl3 valve closed
2/19/10	12:15:54 AM	PH3 valve closed
2/19/10	12:15:54 AM	SiCl4 pre valve closed
2/19/10	12:15:54 AM	SiCl4 post valve closed
2/19/10	12:15:54 AM	Main Vac valve closed
2/19/10	12:15:54 AM	Bypass valve closed
2/19/10	12:15:54 AM	Bubbler valve closed
2/19/10	12:15:54 AM	Helium MFC set to  0.000000
2/19/10	12:15:54 AM	H2 MFC set to  0.000000
2/19/10	12:15:54 AM	BCl3 MFC set to  0.000000
2/19/10	12:15:54 AM	SiCl4 MFC set to  0.000000
2/19/10	12:15:54 AM	Bypass solenoid MFC set to  760.000000
2/19/10	12:15:54 AM	Tube furnace set to 0
2/19/10	12:17:17 AM	Recipe started at 12:17 AM
2/19/10	12:17:17 AM	Helium valve closed
2/19/10	12:17:17 AM	BCl3 valve closed
2/19/10	12:17:17 AM	SiCl4 post valve closed
2/19/10	12:17:17 AM	Main Vac valve closed
2/19/10	12:17:17 AM	Bubbler valve closed
2/19/10	12:17:17 AM	H2 valve opened
2/19/10	12:17:17 AM	PH3 valve opened
2/19/10	12:17:17 AM	SiCl4 pre valve opened
2/19/10	12:17:17 AM	Bypass valve opened
2/19/10	12:17:17 AM	Helium MFC set to  0.000000
2/19/10	12:17:17 AM	H2 MFC set to  0.000000
2/19/10	12:17:17 AM	BCl3 MFC set to  0.000000
2/19/10	12:17:17 AM	SiCl4 MFC set to  0.000000
2/19/10	12:17:17 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:17:17 AM	Tube furnace set to 0
2/19/10	12:17:22 AM	H2 valve closed
2/19/10	12:17:22 AM	PH3 valve closed
2/19/10	12:17:22 AM	SiCl4 pre valve closed
2/19/10	12:17:22 AM	Main Vac valve closed
2/19/10	12:17:22 AM	Bypass valve closed
2/19/10	12:17:22 AM	Helium valve opened
2/19/10	12:17:22 AM	BCl3 valve opened
2/19/10	12:17:22 AM	SiCl4 post valve opened
2/19/10	12:17:22 AM	Bubbler valve opened
2/19/10	12:17:22 AM	Helium MFC set to  0.000000
2/19/10	12:17:22 AM	H2 MFC set to  0.000000
2/19/10	12:17:22 AM	BCl3 MFC set to  0.000000
2/19/10	12:17:22 AM	SiCl4 MFC set to  0.000000
2/19/10	12:17:22 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:17:22 AM	Tube furnace set to 0
2/19/10	12:17:28 AM	Helium valve closed
2/19/10	12:17:28 AM	H2 valve closed
2/19/10	12:17:28 AM	BCl3 valve closed
2/19/10	12:17:28 AM	PH3 valve closed
2/19/10	12:17:28 AM	SiCl4 pre valve closed
2/19/10	12:17:28 AM	SiCl4 post valve closed
2/19/10	12:17:28 AM	Main Vac valve closed
2/19/10	12:17:28 AM	Bubbler valve closed
2/19/10	12:17:28 AM	Bypass valve opened
2/19/10	12:17:28 AM	Helium MFC set to  0.000000
2/19/10	12:17:28 AM	H2 MFC set to  0.000000
2/19/10	12:17:28 AM	BCl3 MFC set to  0.000000
2/19/10	12:17:28 AM	SiCl4 MFC set to  0.000000
2/19/10	12:17:28 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:17:28 AM	Tube furnace set to 0
2/19/10	12:17:33 AM	Helium valve closed
2/19/10	12:17:33 AM	H2 valve closed
2/19/10	12:17:33 AM	BCl3 valve closed
2/19/10	12:17:33 AM	PH3 valve closed
2/19/10	12:17:33 AM	SiCl4 pre valve closed
2/19/10	12:17:33 AM	SiCl4 post valve closed
2/19/10	12:17:33 AM	Bypass valve closed
2/19/10	12:17:33 AM	Bubbler valve closed
2/19/10	12:17:33 AM	Main Vac valve opened
2/19/10	12:17:33 AM	Helium MFC set to  0.000000
2/19/10	12:17:33 AM	H2 MFC set to  0.000000
2/19/10	12:17:33 AM	BCl3 MFC set to  0.000000
2/19/10	12:17:33 AM	SiCl4 MFC set to  0.000000
2/19/10	12:17:33 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:17:33 AM	Tube furnace set to 0
2/19/10	12:17:38 AM	Run finished at 12:17 AM
2/19/10	12:17:49 AM	Program exited cleanly
2/19/10	12:18:05 AM	Program started normally
2/19/10	12:18:05 AM	Helium valve closed
2/19/10	12:18:05 AM	H2 valve closed
2/19/10	12:18:05 AM	BCl3 valve closed
2/19/10	12:18:05 AM	PH3 valve closed
2/19/10	12:18:05 AM	SiCl4 pre valve closed
2/19/10	12:18:05 AM	SiCl4 post valve closed
2/19/10	12:18:05 AM	Main Vac valve closed
2/19/10	12:18:05 AM	Bypass valve closed
2/19/10	12:18:05 AM	Bubbler valve closed
2/19/10	12:18:05 AM	Helium MFC set to  0.000000
2/19/10	12:18:05 AM	H2 MFC set to  0.000000
2/19/10	12:18:05 AM	BCl3 MFC set to  0.000000
2/19/10	12:18:05 AM	SiCl4 MFC set to  0.000000
2/19/10	12:18:05 AM	Bypass solenoid MFC set to  760.000000
2/19/10	12:18:05 AM	Tube furnace set to 0
2/19/10	12:18:06 AM	PH3 valve opened
2/19/10	12:18:06 AM	H2 valve opened
2/19/10	12:19:00 AM	Recipe started at 12:19 AM
2/19/10	12:19:00 AM	Helium valve closed
2/19/10	12:19:00 AM	BCl3 valve closed
2/19/10	12:19:00 AM	Main Vac valve closed
2/19/10	12:19:00 AM	Bubbler valve closed
2/19/10	12:19:00 AM	H2 valve opened
2/19/10	12:19:00 AM	PH3 valve opened
2/19/10	12:19:00 AM	SiCl4 pre valve opened
2/19/10	12:19:00 AM	SiCl4 post valve opened
2/19/10	12:19:00 AM	Bypass valve opened
2/19/10	12:19:00 AM	Helium MFC set to  0.000000
2/19/10	12:19:00 AM	H2 MFC set to  0.000000
2/19/10	12:19:00 AM	BCl3 MFC set to  0.000000
2/19/10	12:19:00 AM	SiCl4 MFC set to  0.000000
2/19/10	12:19:00 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:19:00 AM	Tube furnace set to 0
2/19/10	12:19:05 AM	H2 valve closed
2/19/10	12:19:05 AM	BCl3 valve closed
2/19/10	12:19:05 AM	PH3 valve closed
2/19/10	12:19:05 AM	SiCl4 pre valve closed
2/19/10	12:19:05 AM	SiCl4 post valve closed
2/19/10	12:19:05 AM	Main Vac valve closed
2/19/10	12:19:05 AM	Bypass valve closed
2/19/10	12:19:05 AM	Helium valve opened
2/19/10	12:19:05 AM	Bubbler valve opened
2/19/10	12:19:05 AM	Helium MFC set to  0.000000
2/19/10	12:19:05 AM	H2 MFC set to  0.000000
2/19/10	12:19:05 AM	BCl3 MFC set to  0.000000
2/19/10	12:19:05 AM	SiCl4 MFC set to  0.000000
2/19/10	12:19:05 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:19:05 AM	Tube furnace set to 0
2/19/10	12:19:10 AM	H2 valve closed
2/19/10	12:19:10 AM	BCl3 valve closed
2/19/10	12:19:10 AM	PH3 valve closed
2/19/10	12:19:10 AM	SiCl4 pre valve closed
2/19/10	12:19:10 AM	SiCl4 post valve closed
2/19/10	12:19:10 AM	Main Vac valve closed
2/19/10	12:19:10 AM	Bypass valve closed
2/19/10	12:19:10 AM	Helium valve opened
2/19/10	12:19:10 AM	Bubbler valve opened
2/19/10	12:19:10 AM	Helium MFC set to  0.000000
2/19/10	12:19:10 AM	H2 MFC set to  0.000000
2/19/10	12:19:10 AM	BCl3 MFC set to  0.000000
2/19/10	12:19:10 AM	SiCl4 MFC set to  0.000000
2/19/10	12:19:10 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:19:10 AM	Tube furnace set to 0
2/19/10	12:19:16 AM	Run finished at 12:19 AM
2/19/10	12:19:30 AM	Program exited cleanly
2/19/10	12:22:00 AM	Program started normally
2/19/10	12:22:00 AM	Helium valve closed
2/19/10	12:22:00 AM	H2 valve closed
2/19/10	12:22:00 AM	BCl3 valve closed
2/19/10	12:22:00 AM	PH3 valve closed
2/19/10	12:22:00 AM	SiCl4 pre valve closed
2/19/10	12:22:00 AM	SiCl4 post valve closed
2/19/10	12:22:00 AM	Main Vac valve closed
2/19/10	12:22:00 AM	Bypass valve closed
2/19/10	12:22:00 AM	Bubbler valve closed
2/19/10	12:22:00 AM	Helium MFC set to  0.000000
2/19/10	12:22:00 AM	H2 MFC set to  0.000000
2/19/10	12:22:00 AM	BCl3 MFC set to  0.000000
2/19/10	12:22:00 AM	SiCl4 MFC set to  0.000000
2/19/10	12:22:00 AM	Bypass solenoid MFC set to  760.000000
2/19/10	12:22:00 AM	Tube furnace set to 0
2/19/10	12:22:25 AM	Recipe started at 12:22 AM
2/19/10	12:22:25 AM	Helium valve closed
2/19/10	12:22:25 AM	BCl3 valve closed
2/19/10	12:22:25 AM	PH3 valve closed
2/19/10	12:22:25 AM	SiCl4 pre valve closed
2/19/10	12:22:25 AM	SiCl4 post valve closed
2/19/10	12:22:25 AM	Main Vac valve closed
2/19/10	12:22:25 AM	Bypass valve closed
2/19/10	12:22:25 AM	Bubbler valve closed
2/19/10	12:22:25 AM	H2 valve opened
2/19/10	12:22:25 AM	Helium MFC set to  0.000000
2/19/10	12:22:25 AM	H2 MFC set to  500.000000
2/19/10	12:22:25 AM	BCl3 MFC set to  0.000000
2/19/10	12:22:25 AM	SiCl4 MFC set to  0.000000
2/19/10	12:22:25 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:22:25 AM	Tube furnace set to 0
2/19/10	12:22:25 AM	Helium valve closed
2/19/10	12:22:25 AM	BCl3 valve closed
2/19/10	12:22:25 AM	PH3 valve closed
2/19/10	12:22:25 AM	SiCl4 pre valve closed
2/19/10	12:22:25 AM	SiCl4 post valve closed
2/19/10	12:22:25 AM	Main Vac valve closed
2/19/10	12:22:25 AM	Bypass valve closed
2/19/10	12:22:25 AM	H2 valve opened
2/19/10	12:22:25 AM	Bubbler valve opened
2/19/10	12:22:25 AM	Helium MFC set to  0.000000
2/19/10	12:22:25 AM	H2 MFC set to  500.000000
2/19/10	12:22:25 AM	BCl3 MFC set to  0.000000
2/19/10	12:22:25 AM	SiCl4 MFC set to  0.000000
2/19/10	12:22:25 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:22:25 AM	Tube furnace set to 0
2/19/10	12:22:31 AM	Helium valve closed
2/19/10	12:22:31 AM	BCl3 valve closed
2/19/10	12:22:31 AM	PH3 valve closed
2/19/10	12:22:31 AM	Main Vac valve closed
2/19/10	12:22:31 AM	Bypass valve closed
2/19/10	12:22:31 AM	H2 valve opened
2/19/10	12:22:31 AM	SiCl4 pre valve opened
2/19/10	12:22:31 AM	SiCl4 post valve opened
2/19/10	12:22:31 AM	Bubbler valve opened
2/19/10	12:22:31 AM	Helium MFC set to  0.000000
2/19/10	12:22:31 AM	H2 MFC set to  500.000000
2/19/10	12:22:31 AM	BCl3 MFC set to  0.000000
2/19/10	12:22:31 AM	SiCl4 MFC set to  325.000000
2/19/10	12:22:31 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:22:31 AM	Tube furnace set to 0
2/19/10	12:22:36 AM	H2 valve closed
2/19/10	12:22:36 AM	BCl3 valve closed
2/19/10	12:22:36 AM	PH3 valve closed
2/19/10	12:22:36 AM	SiCl4 pre valve closed
2/19/10	12:22:36 AM	SiCl4 post valve closed
2/19/10	12:22:36 AM	Main Vac valve closed
2/19/10	12:22:36 AM	Bypass valve closed
2/19/10	12:22:36 AM	Helium valve opened
2/19/10	12:22:36 AM	Bubbler valve opened
2/19/10	12:22:36 AM	Helium MFC set to  500.000000
2/19/10	12:22:36 AM	H2 MFC set to  0.000000
2/19/10	12:22:36 AM	BCl3 MFC set to  0.000000
2/19/10	12:22:36 AM	SiCl4 MFC set to  0.000000
2/19/10	12:22:36 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:22:36 AM	Tube furnace set to 0
2/19/10	12:22:41 AM	Helium valve closed
2/19/10	12:22:41 AM	H2 valve closed
2/19/10	12:22:41 AM	BCl3 valve closed
2/19/10	12:22:41 AM	PH3 valve closed
2/19/10	12:22:41 AM	SiCl4 pre valve closed
2/19/10	12:22:41 AM	SiCl4 post valve closed
2/19/10	12:22:41 AM	Main Vac valve closed
2/19/10	12:22:41 AM	Bypass valve closed
2/19/10	12:22:41 AM	Bubbler valve closed
2/19/10	12:22:41 AM	Helium MFC set to  0.000000
2/19/10	12:22:41 AM	H2 MFC set to  0.000000
2/19/10	12:22:41 AM	BCl3 MFC set to  0.000000
2/19/10	12:22:41 AM	SiCl4 MFC set to  0.000000
2/19/10	12:22:41 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:22:41 AM	Tube furnace set to 0
2/19/10	12:22:42 AM	Run finished at 12:22 AM
2/19/10	12:23:04 AM	Program exited cleanly
2/19/10	12:25:33 AM	Program started normally
2/19/10	12:25:33 AM	Helium valve closed
2/19/10	12:25:33 AM	H2 valve closed
2/19/10	12:25:33 AM	BCl3 valve closed
2/19/10	12:25:33 AM	PH3 valve closed
2/19/10	12:25:33 AM	SiCl4 pre valve closed
2/19/10	12:25:33 AM	SiCl4 post valve closed
2/19/10	12:25:33 AM	Main Vac valve closed
2/19/10	12:25:33 AM	Bypass valve closed
2/19/10	12:25:33 AM	Bubbler valve closed
2/19/10	12:25:33 AM	Helium MFC set to  0.000000
2/19/10	12:25:33 AM	H2 MFC set to  0.000000
2/19/10	12:25:33 AM	BCl3 MFC set to  0.000000
2/19/10	12:25:33 AM	SiCl4 MFC set to  0.000000
2/19/10	12:25:33 AM	Bypass solenoid MFC set to  760.000000
2/19/10	12:25:33 AM	Tube furnace set to 0
2/19/10	12:25:45 AM	Recipe started at 12:25 AM
2/19/10	12:25:45 AM	Helium valve closed
2/19/10	12:25:45 AM	H2 valve closed
2/19/10	12:25:45 AM	BCl3 valve closed
2/19/10	12:25:45 AM	PH3 valve closed
2/19/10	12:25:45 AM	SiCl4 pre valve closed
2/19/10	12:25:45 AM	SiCl4 post valve closed
2/19/10	12:25:45 AM	Main Vac valve closed
2/19/10	12:25:45 AM	Bypass valve closed
2/19/10	12:25:45 AM	Bubbler valve closed
2/19/10	12:25:45 AM	Helium MFC set to  0.000000
2/19/10	12:25:45 AM	H2 MFC set to  0.000000
2/19/10	12:25:45 AM	BCl3 MFC set to  0.000000
2/19/10	12:25:45 AM	SiCl4 MFC set to  0.000000
2/19/10	12:25:45 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:25:45 AM	Tube furnace set to 0
2/19/10	12:25:46 AM	Run finished at 12:25 AM
2/19/10	12:25:51 AM	Recipe started at 12:25 AM
2/19/10	12:25:51 AM	Helium valve closed
2/19/10	12:25:51 AM	H2 valve closed
2/19/10	12:25:51 AM	BCl3 valve closed
2/19/10	12:25:51 AM	PH3 valve closed
2/19/10	12:25:51 AM	SiCl4 pre valve closed
2/19/10	12:25:51 AM	SiCl4 post valve closed
2/19/10	12:25:51 AM	Main Vac valve closed
2/19/10	12:25:51 AM	Bypass valve closed
2/19/10	12:25:51 AM	Bubbler valve closed
2/19/10	12:25:51 AM	Helium MFC set to  0.000000
2/19/10	12:25:51 AM	H2 MFC set to  0.000000
2/19/10	12:25:51 AM	BCl3 MFC set to  0.000000
2/19/10	12:25:51 AM	SiCl4 MFC set to  0.000000
2/19/10	12:25:51 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:25:51 AM	Tube furnace set to 0
2/19/10	12:25:51 AM	Helium valve closed
2/19/10	12:25:51 AM	H2 valve closed
2/19/10	12:25:51 AM	BCl3 valve closed
2/19/10	12:25:51 AM	PH3 valve closed
2/19/10	12:25:51 AM	SiCl4 pre valve closed
2/19/10	12:25:51 AM	SiCl4 post valve closed
2/19/10	12:25:51 AM	Main Vac valve closed
2/19/10	12:25:51 AM	Bypass valve closed
2/19/10	12:25:51 AM	Bubbler valve closed
2/19/10	12:25:51 AM	Helium MFC set to  0.000000
2/19/10	12:25:51 AM	H2 MFC set to  0.000000
2/19/10	12:25:51 AM	BCl3 MFC set to  0.000000
2/19/10	12:25:51 AM	SiCl4 MFC set to  0.000000
2/19/10	12:25:51 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:25:51 AM	Tube furnace set to 0
2/19/10	12:25:52 AM	Helium valve closed
2/19/10	12:25:52 AM	H2 valve closed
2/19/10	12:25:52 AM	BCl3 valve closed
2/19/10	12:25:52 AM	PH3 valve closed
2/19/10	12:25:52 AM	SiCl4 pre valve closed
2/19/10	12:25:52 AM	SiCl4 post valve closed
2/19/10	12:25:52 AM	Main Vac valve closed
2/19/10	12:25:52 AM	Bypass valve closed
2/19/10	12:25:52 AM	Bubbler valve closed
2/19/10	12:25:52 AM	Helium MFC set to  0.000000
2/19/10	12:25:52 AM	H2 MFC set to  0.000000
2/19/10	12:25:52 AM	BCl3 MFC set to  0.000000
2/19/10	12:25:52 AM	SiCl4 MFC set to  0.000000
2/19/10	12:25:52 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:25:52 AM	Tube furnace set to 0
2/19/10	12:25:52 AM	Run finished at 12:25 AM
2/19/10	12:25:54 AM	Program exited cleanly
2/19/10	12:28:30 AM	Program started normally
2/19/10	12:28:30 AM	Helium valve closed
2/19/10	12:28:30 AM	H2 valve closed
2/19/10	12:28:30 AM	BCl3 valve closed
2/19/10	12:28:30 AM	PH3 valve closed
2/19/10	12:28:30 AM	SiCl4 pre valve closed
2/19/10	12:28:31 AM	SiCl4 post valve closed
2/19/10	12:28:31 AM	Main Vac valve closed
2/19/10	12:28:31 AM	Bypass valve closed
2/19/10	12:28:31 AM	Bubbler valve closed
2/19/10	12:28:31 AM	Helium MFC set to  0.000000
2/19/10	12:28:31 AM	H2 MFC set to  0.000000
2/19/10	12:28:31 AM	BCl3 MFC set to  0.000000
2/19/10	12:28:31 AM	SiCl4 MFC set to  0.000000
2/19/10	12:28:31 AM	Bypass solenoid MFC set to  760.000000
2/19/10	12:28:31 AM	Tube furnace set to 0
2/19/10	12:28:35 AM	Recipe started at 12:28 AM
2/19/10	12:28:36 AM	Helium valve closed
2/19/10	12:28:36 AM	H2 valve closed
2/19/10	12:28:36 AM	BCl3 valve closed
2/19/10	12:28:36 AM	PH3 valve closed
2/19/10	12:28:36 AM	SiCl4 pre valve closed
2/19/10	12:28:36 AM	SiCl4 post valve closed
2/19/10	12:28:36 AM	Main Vac valve closed
2/19/10	12:28:36 AM	Bypass valve closed
2/19/10	12:28:36 AM	Bubbler valve closed
2/19/10	12:28:36 AM	Helium MFC set to  0.000000
2/19/10	12:28:36 AM	H2 MFC set to  0.000000
2/19/10	12:28:36 AM	BCl3 MFC set to  0.000000
2/19/10	12:28:36 AM	SiCl4 MFC set to  0.000000
2/19/10	12:28:36 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:28:36 AM	Tube furnace set to 0
2/19/10	12:28:36 AM	Helium valve closed
2/19/10	12:28:36 AM	H2 valve closed
2/19/10	12:28:36 AM	BCl3 valve closed
2/19/10	12:28:36 AM	PH3 valve closed
2/19/10	12:28:36 AM	SiCl4 pre valve closed
2/19/10	12:28:36 AM	SiCl4 post valve closed
2/19/10	12:28:36 AM	Main Vac valve closed
2/19/10	12:28:36 AM	Bypass valve closed
2/19/10	12:28:36 AM	Bubbler valve closed
2/19/10	12:28:36 AM	Helium MFC set to  0.000000
2/19/10	12:28:36 AM	H2 MFC set to  0.000000
2/19/10	12:28:36 AM	BCl3 MFC set to  0.000000
2/19/10	12:28:36 AM	SiCl4 MFC set to  0.000000
2/19/10	12:28:36 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:28:36 AM	Tube furnace set to 0
2/19/10	12:28:36 AM	Helium valve closed
2/19/10	12:28:36 AM	H2 valve closed
2/19/10	12:28:36 AM	BCl3 valve closed
2/19/10	12:28:36 AM	PH3 valve closed
2/19/10	12:28:36 AM	SiCl4 pre valve closed
2/19/10	12:28:36 AM	SiCl4 post valve closed
2/19/10	12:28:36 AM	Main Vac valve closed
2/19/10	12:28:36 AM	Bypass valve closed
2/19/10	12:28:36 AM	Bubbler valve closed
2/19/10	12:28:36 AM	Helium MFC set to  0.000000
2/19/10	12:28:36 AM	H2 MFC set to  0.000000
2/19/10	12:28:36 AM	BCl3 MFC set to  0.000000
2/19/10	12:28:36 AM	SiCl4 MFC set to  0.000000
2/19/10	12:28:36 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:28:36 AM	Tube furnace set to 0
2/19/10	12:28:37 AM	Run finished at 12:28 AM
2/19/10	12:28:47 AM	Recipe started at 12:28 AM
2/19/10	12:28:47 AM	Helium valve closed
2/19/10	12:28:47 AM	H2 valve closed
2/19/10	12:28:47 AM	BCl3 valve closed
2/19/10	12:28:47 AM	PH3 valve closed
2/19/10	12:28:47 AM	SiCl4 pre valve closed
2/19/10	12:28:47 AM	SiCl4 post valve closed
2/19/10	12:28:47 AM	Main Vac valve closed
2/19/10	12:28:47 AM	Bypass valve closed
2/19/10	12:28:47 AM	Bubbler valve closed
2/19/10	12:28:47 AM	Helium MFC set to  0.000000
2/19/10	12:28:47 AM	H2 MFC set to  0.000000
2/19/10	12:28:47 AM	BCl3 MFC set to  0.000000
2/19/10	12:28:47 AM	SiCl4 MFC set to  0.000000
2/19/10	12:28:47 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:28:47 AM	Tube furnace set to 0
2/19/10	12:28:52 AM	Helium valve closed
2/19/10	12:28:52 AM	H2 valve closed
2/19/10	12:28:52 AM	BCl3 valve closed
2/19/10	12:28:52 AM	PH3 valve closed
2/19/10	12:28:52 AM	SiCl4 pre valve closed
2/19/10	12:28:52 AM	SiCl4 post valve closed
2/19/10	12:28:52 AM	Main Vac valve closed
2/19/10	12:28:52 AM	Bypass valve closed
2/19/10	12:28:52 AM	Bubbler valve closed
2/19/10	12:28:52 AM	Helium MFC set to  0.000000
2/19/10	12:28:52 AM	H2 MFC set to  0.000000
2/19/10	12:28:52 AM	BCl3 MFC set to  0.000000
2/19/10	12:28:52 AM	SiCl4 MFC set to  0.000000
2/19/10	12:28:52 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:28:53 AM	Tube furnace set to 0
2/19/10	12:28:58 AM	Helium valve closed
2/19/10	12:28:58 AM	H2 valve closed
2/19/10	12:28:58 AM	BCl3 valve closed
2/19/10	12:28:58 AM	PH3 valve closed
2/19/10	12:28:58 AM	SiCl4 pre valve closed
2/19/10	12:28:58 AM	SiCl4 post valve closed
2/19/10	12:28:58 AM	Main Vac valve closed
2/19/10	12:28:58 AM	Bypass valve closed
2/19/10	12:28:58 AM	Bubbler valve closed
2/19/10	12:28:58 AM	Helium MFC set to  0.000000
2/19/10	12:28:58 AM	H2 MFC set to  0.000000
2/19/10	12:28:58 AM	BCl3 MFC set to  0.000000
2/19/10	12:28:58 AM	SiCl4 MFC set to  0.000000
2/19/10	12:28:58 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:28:58 AM	Tube furnace set to 0
2/19/10	12:29:03 AM	Run finished at 12:29 AM
2/19/10	12:29:07 AM	Program exited cleanly
2/19/10	12:32:42 AM	Program started normally
2/19/10	12:32:42 AM	Helium valve closed
2/19/10	12:32:42 AM	H2 valve closed
2/19/10	12:32:42 AM	BCl3 valve closed
2/19/10	12:32:42 AM	PH3 valve closed
2/19/10	12:32:42 AM	SiCl4 pre valve closed
2/19/10	12:32:42 AM	SiCl4 post valve closed
2/19/10	12:32:42 AM	Main Vac valve closed
2/19/10	12:32:42 AM	Bypass valve closed
2/19/10	12:32:42 AM	Bubbler valve closed
2/19/10	12:32:42 AM	Helium MFC set to  0.000000
2/19/10	12:32:42 AM	H2 MFC set to  0.000000
2/19/10	12:32:42 AM	BCl3 MFC set to  0.000000
2/19/10	12:32:42 AM	SiCl4 MFC set to  0.000000
2/19/10	12:32:42 AM	Bypass solenoid MFC set to  760.000000
2/19/10	12:32:42 AM	Tube furnace set to 0
2/19/10	12:33:03 AM	Recipe started at 12:33 AM
2/19/10	12:33:03 AM	Helium valve closed
2/19/10	12:33:03 AM	H2 valve closed
2/19/10	12:33:03 AM	BCl3 valve closed
2/19/10	12:33:03 AM	SiCl4 pre valve closed
2/19/10	12:33:03 AM	SiCl4 post valve closed
2/19/10	12:33:03 AM	Main Vac valve closed
2/19/10	12:33:03 AM	Bypass valve closed
2/19/10	12:33:03 AM	Bubbler valve closed
2/19/10	12:33:03 AM	PH3 valve opened
2/19/10	12:33:03 AM	Helium MFC set to  0.000000
2/19/10	12:33:03 AM	H2 MFC set to  0.000000
2/19/10	12:33:03 AM	BCl3 MFC set to  0.000000
2/19/10	12:33:03 AM	SiCl4 MFC set to  0.000000
2/19/10	12:33:03 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:33:03 AM	Tube furnace set to 0
2/19/10	12:33:06 AM	Helium valve closed
2/19/10	12:33:06 AM	H2 valve closed
2/19/10	12:33:06 AM	PH3 valve closed
2/19/10	12:33:06 AM	SiCl4 pre valve closed
2/19/10	12:33:06 AM	SiCl4 post valve closed
2/19/10	12:33:06 AM	Main Vac valve closed
2/19/10	12:33:06 AM	Bypass valve closed
2/19/10	12:33:06 AM	Bubbler valve closed
2/19/10	12:33:06 AM	BCl3 valve opened
2/19/10	12:33:06 AM	Helium MFC set to  0.000000
2/19/10	12:33:06 AM	H2 MFC set to  0.000000
2/19/10	12:33:06 AM	BCl3 MFC set to  0.000000
2/19/10	12:33:06 AM	SiCl4 MFC set to  0.000000
2/19/10	12:33:06 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:33:06 AM	Tube furnace set to 0
2/19/10	12:33:10 AM	Helium valve closed
2/19/10	12:33:10 AM	BCl3 valve closed
2/19/10	12:33:10 AM	PH3 valve closed
2/19/10	12:33:10 AM	SiCl4 pre valve closed
2/19/10	12:33:10 AM	SiCl4 post valve closed
2/19/10	12:33:10 AM	Main Vac valve closed
2/19/10	12:33:10 AM	Bypass valve closed
2/19/10	12:33:10 AM	Bubbler valve closed
2/19/10	12:33:10 AM	H2 valve opened
2/19/10	12:33:10 AM	Helium MFC set to  0.000000
2/19/10	12:33:10 AM	H2 MFC set to  0.000000
2/19/10	12:33:10 AM	BCl3 MFC set to  0.000000
2/19/10	12:33:10 AM	SiCl4 MFC set to  0.000000
2/19/10	12:33:10 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:33:10 AM	Tube furnace set to 0
2/19/10	12:33:21 AM	H2 valve closed
2/19/10	12:33:21 AM	BCl3 valve closed
2/19/10	12:33:21 AM	PH3 valve closed
2/19/10	12:33:21 AM	SiCl4 pre valve closed
2/19/10	12:33:21 AM	SiCl4 post valve closed
2/19/10	12:33:21 AM	Main Vac valve closed
2/19/10	12:33:21 AM	Bypass valve closed
2/19/10	12:33:21 AM	Bubbler valve closed
2/19/10	12:33:21 AM	Helium valve opened
2/19/10	12:33:21 AM	Helium MFC set to  0.000000
2/19/10	12:33:21 AM	H2 MFC set to  0.000000
2/19/10	12:33:21 AM	BCl3 MFC set to  0.000000
2/19/10	12:33:21 AM	SiCl4 MFC set to  0.000000
2/19/10	12:33:21 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:33:21 AM	Tube furnace set to 0
2/19/10	12:33:31 AM	Helium valve closed
2/19/10	12:33:31 AM	H2 valve closed
2/19/10	12:33:31 AM	BCl3 valve closed
2/19/10	12:33:31 AM	PH3 valve closed
2/19/10	12:33:31 AM	SiCl4 pre valve closed
2/19/10	12:33:31 AM	SiCl4 post valve closed
2/19/10	12:33:31 AM	Main Vac valve closed
2/19/10	12:33:31 AM	Bypass valve closed
2/19/10	12:33:31 AM	Bubbler valve opened
2/19/10	12:33:31 AM	Helium MFC set to  0.000000
2/19/10	12:33:31 AM	H2 MFC set to  0.000000
2/19/10	12:33:31 AM	BCl3 MFC set to  0.000000
2/19/10	12:33:31 AM	SiCl4 MFC set to  0.000000
2/19/10	12:33:31 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:33:31 AM	Tube furnace set to 0
2/19/10	12:33:41 AM	Run finished at 12:33 AM
2/19/10	12:33:53 AM	Recipe started at 12:33 AM
2/19/10	12:33:53 AM	Helium valve closed
2/19/10	12:33:53 AM	H2 valve closed
2/19/10	12:33:53 AM	BCl3 valve closed
2/19/10	12:33:53 AM	SiCl4 pre valve closed
2/19/10	12:33:53 AM	SiCl4 post valve closed
2/19/10	12:33:53 AM	Main Vac valve closed
2/19/10	12:33:53 AM	Bypass valve closed
2/19/10	12:33:53 AM	Bubbler valve closed
2/19/10	12:33:53 AM	PH3 valve opened
2/19/10	12:33:53 AM	Helium MFC set to  0.000000
2/19/10	12:33:53 AM	H2 MFC set to  0.000000
2/19/10	12:33:53 AM	BCl3 MFC set to  0.000000
2/19/10	12:33:53 AM	SiCl4 MFC set to  0.000000
2/19/10	12:33:53 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:33:53 AM	Tube furnace set to 0
2/19/10	12:33:59 AM	Run aborted at 12:33 AM
2/19/10	12:34:18 AM	Program exited cleanly
2/19/10	12:35:20 AM	Program started normally
2/19/10	12:35:21 AM	Helium valve closed
2/19/10	12:35:21 AM	H2 valve closed
2/19/10	12:35:21 AM	BCl3 valve closed
2/19/10	12:35:21 AM	PH3 valve closed
2/19/10	12:35:21 AM	SiCl4 pre valve closed
2/19/10	12:35:21 AM	SiCl4 post valve closed
2/19/10	12:35:21 AM	Main Vac valve closed
2/19/10	12:35:21 AM	Bypass valve closed
2/19/10	12:35:21 AM	Bubbler valve closed
2/19/10	12:35:21 AM	Helium MFC set to  0.000000
2/19/10	12:35:21 AM	H2 MFC set to  0.000000
2/19/10	12:35:21 AM	BCl3 MFC set to  0.000000
2/19/10	12:35:21 AM	SiCl4 MFC set to  0.000000
2/19/10	12:35:21 AM	Bypass solenoid MFC set to  760.000000
2/19/10	12:35:21 AM	Tube furnace set to 0
2/19/10	12:35:45 AM	Recipe started at 12:35 AM
2/19/10	12:35:45 AM	Helium valve closed
2/19/10	12:35:45 AM	H2 valve closed
2/19/10	12:35:45 AM	BCl3 valve closed
2/19/10	12:35:45 AM	PH3 valve closed
2/19/10	12:35:45 AM	SiCl4 post valve closed
2/19/10	12:35:45 AM	Main Vac valve closed
2/19/10	12:35:45 AM	Bypass valve closed
2/19/10	12:35:45 AM	SiCl4 pre valve opened
2/19/10	12:35:45 AM	Bubbler valve opened
2/19/10	12:35:45 AM	Helium MFC set to  0.000000
2/19/10	12:35:45 AM	H2 MFC set to  0.000000
2/19/10	12:35:45 AM	BCl3 MFC set to  0.000000
2/19/10	12:35:45 AM	SiCl4 MFC set to  0.000000
2/19/10	12:35:45 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:35:45 AM	Tube furnace set to 0
2/19/10	12:35:56 AM	Helium valve closed
2/19/10	12:35:56 AM	H2 valve closed
2/19/10	12:35:56 AM	BCl3 valve closed
2/19/10	12:35:56 AM	PH3 valve closed
2/19/10	12:35:56 AM	SiCl4 pre valve closed
2/19/10	12:35:56 AM	Main Vac valve closed
2/19/10	12:35:56 AM	Bubbler valve closed
2/19/10	12:35:56 AM	SiCl4 post valve opened
2/19/10	12:35:56 AM	Bypass valve opened
2/19/10	12:35:56 AM	Helium MFC set to  0.000000
2/19/10	12:35:56 AM	H2 MFC set to  0.000000
2/19/10	12:35:56 AM	BCl3 MFC set to  0.000000
2/19/10	12:35:56 AM	SiCl4 MFC set to  0.000000
2/19/10	12:35:56 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:35:56 AM	Tube furnace set to 0
2/19/10	12:36:01 AM	Run aborted at 12:36 AM
2/19/10	12:36:15 AM	Recipe started at 12:36 AM
2/19/10	12:36:15 AM	Helium valve closed
2/19/10	12:36:15 AM	H2 valve closed
2/19/10	12:36:15 AM	BCl3 valve closed
2/19/10	12:36:15 AM	PH3 valve closed
2/19/10	12:36:15 AM	SiCl4 post valve closed
2/19/10	12:36:15 AM	Main Vac valve closed
2/19/10	12:36:15 AM	Bypass valve closed
2/19/10	12:36:15 AM	SiCl4 pre valve opened
2/19/10	12:36:15 AM	Bubbler valve opened
2/19/10	12:36:15 AM	Helium MFC set to  0.000000
2/19/10	12:36:15 AM	H2 MFC set to  0.000000
2/19/10	12:36:15 AM	BCl3 MFC set to  0.000000
2/19/10	12:36:15 AM	SiCl4 MFC set to  0.000000
2/19/10	12:36:15 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:36:15 AM	Tube furnace set to 0
2/19/10	12:36:25 AM	Helium valve closed
2/19/10	12:36:25 AM	H2 valve closed
2/19/10	12:36:25 AM	BCl3 valve closed
2/19/10	12:36:25 AM	PH3 valve closed
2/19/10	12:36:25 AM	SiCl4 pre valve closed
2/19/10	12:36:25 AM	Main Vac valve closed
2/19/10	12:36:25 AM	Bubbler valve closed
2/19/10	12:36:25 AM	SiCl4 post valve opened
2/19/10	12:36:25 AM	Bypass valve opened
2/19/10	12:36:25 AM	Helium MFC set to  0.000000
2/19/10	12:36:25 AM	H2 MFC set to  0.000000
2/19/10	12:36:25 AM	BCl3 MFC set to  0.000000
2/19/10	12:36:25 AM	SiCl4 MFC set to  0.000000
2/19/10	12:36:25 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:36:25 AM	Tube furnace set to 0
2/19/10	12:36:29 AM	Run aborted at 12:36 AM
2/19/10	12:36:38 AM	Recipe started at 12:36 AM
2/19/10	12:36:38 AM	Helium valve closed
2/19/10	12:36:38 AM	H2 valve closed
2/19/10	12:36:38 AM	BCl3 valve closed
2/19/10	12:36:38 AM	PH3 valve closed
2/19/10	12:36:38 AM	SiCl4 post valve closed
2/19/10	12:36:38 AM	Main Vac valve closed
2/19/10	12:36:38 AM	Bypass valve closed
2/19/10	12:36:38 AM	SiCl4 pre valve opened
2/19/10	12:36:38 AM	Bubbler valve opened
2/19/10	12:36:38 AM	Helium MFC set to  0.000000
2/19/10	12:36:38 AM	H2 MFC set to  0.000000
2/19/10	12:36:38 AM	BCl3 MFC set to  0.000000
2/19/10	12:36:38 AM	SiCl4 MFC set to  0.000000
2/19/10	12:36:38 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:36:38 AM	Tube furnace set to 0
2/19/10	12:36:40 AM	Helium valve closed
2/19/10	12:36:40 AM	H2 valve closed
2/19/10	12:36:40 AM	BCl3 valve closed
2/19/10	12:36:40 AM	PH3 valve closed
2/19/10	12:36:40 AM	SiCl4 pre valve closed
2/19/10	12:36:40 AM	Main Vac valve closed
2/19/10	12:36:40 AM	Bubbler valve closed
2/19/10	12:36:40 AM	SiCl4 post valve opened
2/19/10	12:36:40 AM	Bypass valve opened
2/19/10	12:36:40 AM	Helium MFC set to  0.000000
2/19/10	12:36:40 AM	H2 MFC set to  0.000000
2/19/10	12:36:40 AM	BCl3 MFC set to  0.000000
2/19/10	12:36:40 AM	SiCl4 MFC set to  0.000000
2/19/10	12:36:40 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:36:40 AM	Tube furnace set to 0
2/19/10	12:36:43 AM	Helium valve closed
2/19/10	12:36:43 AM	H2 valve closed
2/19/10	12:36:43 AM	BCl3 valve closed
2/19/10	12:36:43 AM	PH3 valve closed
2/19/10	12:36:43 AM	SiCl4 pre valve closed
2/19/10	12:36:43 AM	SiCl4 post valve closed
2/19/10	12:36:43 AM	Bubbler valve closed
2/19/10	12:36:43 AM	Main Vac valve opened
2/19/10	12:36:43 AM	Bypass valve opened
2/19/10	12:36:43 AM	Helium MFC set to  0.000000
2/19/10	12:36:43 AM	H2 MFC set to  0.000000
2/19/10	12:36:43 AM	BCl3 MFC set to  0.000000
2/19/10	12:36:43 AM	SiCl4 MFC set to  0.000000
2/19/10	12:36:43 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:36:43 AM	Tube furnace set to 0
2/19/10	12:36:46 AM	Helium valve closed
2/19/10	12:36:46 AM	H2 valve closed
2/19/10	12:36:46 AM	BCl3 valve closed
2/19/10	12:36:46 AM	PH3 valve closed
2/19/10	12:36:46 AM	SiCl4 pre valve closed
2/19/10	12:36:46 AM	SiCl4 post valve closed
2/19/10	12:36:46 AM	Main Vac valve closed
2/19/10	12:36:46 AM	Bypass valve closed
2/19/10	12:36:46 AM	Bubbler valve opened
2/19/10	12:36:46 AM	Helium MFC set to  0.000000
2/19/10	12:36:46 AM	H2 MFC set to  0.000000
2/19/10	12:36:46 AM	BCl3 MFC set to  0.000000
2/19/10	12:36:46 AM	SiCl4 MFC set to  0.000000
2/19/10	12:36:46 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:36:46 AM	Tube furnace set to 0
2/19/10	12:36:57 AM	H2 valve closed
2/19/10	12:36:57 AM	BCl3 valve closed
2/19/10	12:36:57 AM	PH3 valve closed
2/19/10	12:36:57 AM	SiCl4 pre valve closed
2/19/10	12:36:57 AM	SiCl4 post valve closed
2/19/10	12:36:57 AM	Main Vac valve closed
2/19/10	12:36:57 AM	Bypass valve closed
2/19/10	12:36:57 AM	Bubbler valve closed
2/19/10	12:36:57 AM	Helium valve opened
2/19/10	12:36:57 AM	Helium MFC set to  0.000000
2/19/10	12:36:57 AM	H2 MFC set to  0.000000
2/19/10	12:36:57 AM	BCl3 MFC set to  0.000000
2/19/10	12:36:57 AM	SiCl4 MFC set to  0.000000
2/19/10	12:36:57 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:36:57 AM	Tube furnace set to 0
2/19/10	12:37:07 AM	Run finished at 12:37 AM
2/19/10	12:37:25 AM	Recipe started at 12:37 AM
2/19/10	12:37:25 AM	Helium valve closed
2/19/10	12:37:25 AM	H2 valve closed
2/19/10	12:37:25 AM	BCl3 valve closed
2/19/10	12:37:25 AM	PH3 valve closed
2/19/10	12:37:25 AM	SiCl4 post valve closed
2/19/10	12:37:25 AM	Main Vac valve closed
2/19/10	12:37:25 AM	Bypass valve closed
2/19/10	12:37:25 AM	SiCl4 pre valve opened
2/19/10	12:37:25 AM	Bubbler valve opened
2/19/10	12:37:25 AM	Helium MFC set to  0.000000
2/19/10	12:37:25 AM	H2 MFC set to  0.000000
2/19/10	12:37:25 AM	BCl3 MFC set to  0.000000
2/19/10	12:37:25 AM	SiCl4 MFC set to  0.000000
2/19/10	12:37:25 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:37:25 AM	Tube furnace set to 0
2/19/10	12:37:35 AM	Helium valve closed
2/19/10	12:37:35 AM	H2 valve closed
2/19/10	12:37:35 AM	BCl3 valve closed
2/19/10	12:37:35 AM	PH3 valve closed
2/19/10	12:37:35 AM	SiCl4 pre valve closed
2/19/10	12:37:35 AM	Main Vac valve closed
2/19/10	12:37:35 AM	Bubbler valve closed
2/19/10	12:37:35 AM	SiCl4 post valve opened
2/19/10	12:37:35 AM	Bypass valve opened
2/19/10	12:37:35 AM	Helium MFC set to  0.000000
2/19/10	12:37:35 AM	H2 MFC set to  0.000000
2/19/10	12:37:35 AM	BCl3 MFC set to  0.000000
2/19/10	12:37:35 AM	SiCl4 MFC set to  0.000000
2/19/10	12:37:35 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:37:35 AM	Tube furnace set to 0
2/19/10	12:37:46 AM	Helium valve closed
2/19/10	12:37:46 AM	H2 valve closed
2/19/10	12:37:46 AM	BCl3 valve closed
2/19/10	12:37:46 AM	PH3 valve closed
2/19/10	12:37:46 AM	SiCl4 pre valve closed
2/19/10	12:37:46 AM	SiCl4 post valve closed
2/19/10	12:37:46 AM	Bubbler valve closed
2/19/10	12:37:46 AM	Main Vac valve opened
2/19/10	12:37:46 AM	Bypass valve opened
2/19/10	12:37:46 AM	Helium MFC set to  0.000000
2/19/10	12:37:46 AM	H2 MFC set to  0.000000
2/19/10	12:37:46 AM	BCl3 MFC set to  0.000000
2/19/10	12:37:46 AM	SiCl4 MFC set to  0.000000
2/19/10	12:37:46 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:37:46 AM	Tube furnace set to 0
2/19/10	12:37:56 AM	Helium valve closed
2/19/10	12:37:56 AM	H2 valve closed
2/19/10	12:37:56 AM	BCl3 valve closed
2/19/10	12:37:56 AM	PH3 valve closed
2/19/10	12:37:56 AM	SiCl4 pre valve closed
2/19/10	12:37:56 AM	SiCl4 post valve closed
2/19/10	12:37:56 AM	Main Vac valve closed
2/19/10	12:37:56 AM	Bypass valve closed
2/19/10	12:37:56 AM	Bubbler valve opened
2/19/10	12:37:56 AM	Helium MFC set to  0.000000
2/19/10	12:37:56 AM	H2 MFC set to  0.000000
2/19/10	12:37:56 AM	BCl3 MFC set to  0.000000
2/19/10	12:37:56 AM	SiCl4 MFC set to  0.000000
2/19/10	12:37:56 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:37:56 AM	Tube furnace set to 0
2/19/10	12:38:06 AM	H2 valve closed
2/19/10	12:38:07 AM	BCl3 valve closed
2/19/10	12:38:07 AM	PH3 valve closed
2/19/10	12:38:07 AM	SiCl4 pre valve closed
2/19/10	12:38:07 AM	SiCl4 post valve closed
2/19/10	12:38:07 AM	Main Vac valve closed
2/19/10	12:38:07 AM	Bypass valve closed
2/19/10	12:38:07 AM	Bubbler valve closed
2/19/10	12:38:07 AM	Helium valve opened
2/19/10	12:38:07 AM	Helium MFC set to  0.000000
2/19/10	12:38:07 AM	H2 MFC set to  0.000000
2/19/10	12:38:07 AM	BCl3 MFC set to  0.000000
2/19/10	12:38:07 AM	SiCl4 MFC set to  0.000000
2/19/10	12:38:07 AM	Bypass solenoid MFC set to  0.000000
2/19/10	12:38:07 AM	Tube furnace set to 0
2/19/10	12:38:17 AM	Run finished at 12:38 AM
2/19/10	12:38:24 AM	Program exited cleanly
2/19/10	1:24:15 PM	Program started normally
2/19/10	1:24:15 PM	Helium valve closed
2/19/10	1:24:15 PM	H2 valve closed
2/19/10	1:24:15 PM	BCl3 valve closed
2/19/10	1:24:15 PM	PH3 valve closed
2/19/10	1:24:16 PM	SiCl4 pre valve closed
2/19/10	1:24:16 PM	SiCl4 post valve closed
2/19/10	1:24:16 PM	Main Vac valve closed
2/19/10	1:24:16 PM	Bypass valve closed
2/19/10	1:24:16 PM	Bubbler valve closed
2/19/10	1:24:16 PM	Helium MFC set to  0.000000
2/19/10	1:24:16 PM	H2 MFC set to  0.000000
2/19/10	1:24:16 PM	BCl3 MFC set to  0.000000
2/19/10	1:24:16 PM	SiCl4 MFC set to  0.000000
2/19/10	1:24:16 PM	Bypass solenoid MFC set to  760.000000
2/19/10	1:24:16 PM	Tube furnace set to 0
2/19/10	1:24:21 PM	Recipe started at 1:24 PM
2/19/10	1:24:21 PM	Helium valve closed
2/19/10	1:24:21 PM	H2 valve closed
2/19/10	1:24:21 PM	BCl3 valve closed
2/19/10	1:24:21 PM	PH3 valve closed
2/19/10	1:24:21 PM	SiCl4 pre valve closed
2/19/10	1:24:21 PM	SiCl4 post valve closed
2/19/10	1:24:21 PM	Main Vac valve closed
2/19/10	1:24:21 PM	Bypass valve closed
2/19/10	1:24:21 PM	Bubbler valve closed
2/19/10	1:24:21 PM	Helium MFC set to  0.000000
2/19/10	1:24:21 PM	H2 MFC set to  0.000000
2/19/10	1:24:21 PM	BCl3 MFC set to  0.000000
2/19/10	1:24:21 PM	SiCl4 MFC set to  0.000000
2/19/10	1:24:21 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:24:21 PM	Tube furnace set to 0
2/19/10	1:24:22 PM	Helium valve closed
2/19/10	1:24:22 PM	H2 valve closed
2/19/10	1:24:22 PM	BCl3 valve closed
2/19/10	1:24:22 PM	PH3 valve closed
2/19/10	1:24:22 PM	SiCl4 pre valve closed
2/19/10	1:24:22 PM	SiCl4 post valve closed
2/19/10	1:24:22 PM	Main Vac valve closed
2/19/10	1:24:22 PM	Bypass valve closed
2/19/10	1:24:22 PM	Bubbler valve closed
2/19/10	1:24:22 PM	Helium MFC set to  0.000000
2/19/10	1:24:22 PM	H2 MFC set to  0.000000
2/19/10	1:24:22 PM	BCl3 MFC set to  0.000000
2/19/10	1:24:22 PM	SiCl4 MFC set to  0.000000
2/19/10	1:24:22 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:24:22 PM	Tube furnace set to 0
2/19/10	1:24:22 PM	Helium valve closed
2/19/10	1:24:22 PM	H2 valve closed
2/19/10	1:24:22 PM	BCl3 valve closed
2/19/10	1:24:22 PM	PH3 valve closed
2/19/10	1:24:22 PM	SiCl4 pre valve closed
2/19/10	1:24:22 PM	SiCl4 post valve closed
2/19/10	1:24:22 PM	Main Vac valve closed
2/19/10	1:24:22 PM	Bypass valve closed
2/19/10	1:24:22 PM	Bubbler valve closed
2/19/10	1:24:22 PM	Helium MFC set to  0.000000
2/19/10	1:24:22 PM	H2 MFC set to  0.000000
2/19/10	1:24:22 PM	BCl3 MFC set to  0.000000
2/19/10	1:24:22 PM	SiCl4 MFC set to  0.000000
2/19/10	1:24:22 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:24:22 PM	Tube furnace set to 0
2/19/10	1:24:22 PM	Run finished at 1:24 PM
2/19/10	1:25:04 PM	Recipe started at 1:25 PM
2/19/10	1:25:04 PM	Helium valve closed
2/19/10	1:25:04 PM	H2 valve closed
2/19/10	1:25:04 PM	BCl3 valve closed
2/19/10	1:25:04 PM	PH3 valve closed
2/19/10	1:25:04 PM	SiCl4 pre valve closed
2/19/10	1:25:04 PM	SiCl4 post valve closed
2/19/10	1:25:04 PM	Main Vac valve closed
2/19/10	1:25:04 PM	Bypass valve closed
2/19/10	1:25:04 PM	Bubbler valve closed
2/19/10	1:25:04 PM	Helium MFC set to  0.000000
2/19/10	1:25:04 PM	H2 MFC set to  0.000000
2/19/10	1:25:04 PM	BCl3 MFC set to  0.000000
2/19/10	1:25:04 PM	SiCl4 MFC set to  0.000000
2/19/10	1:25:04 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:25:04 PM	Tube furnace set to 0
2/19/10	1:25:04 PM	Helium valve closed
2/19/10	1:25:04 PM	H2 valve closed
2/19/10	1:25:04 PM	BCl3 valve closed
2/19/10	1:25:04 PM	PH3 valve closed
2/19/10	1:25:04 PM	SiCl4 pre valve closed
2/19/10	1:25:04 PM	SiCl4 post valve closed
2/19/10	1:25:04 PM	Main Vac valve closed
2/19/10	1:25:04 PM	Bypass valve closed
2/19/10	1:25:04 PM	Bubbler valve closed
2/19/10	1:25:04 PM	Helium MFC set to  0.000000
2/19/10	1:25:04 PM	H2 MFC set to  0.000000
2/19/10	1:25:04 PM	BCl3 MFC set to  0.000000
2/19/10	1:25:04 PM	SiCl4 MFC set to  0.000000
2/19/10	1:25:04 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:25:04 PM	Tube furnace set to 0
2/19/10	1:25:04 PM	Helium valve closed
2/19/10	1:25:04 PM	H2 valve closed
2/19/10	1:25:04 PM	BCl3 valve closed
2/19/10	1:25:04 PM	PH3 valve closed
2/19/10	1:25:04 PM	SiCl4 pre valve closed
2/19/10	1:25:04 PM	SiCl4 post valve closed
2/19/10	1:25:04 PM	Main Vac valve closed
2/19/10	1:25:04 PM	Bypass valve closed
2/19/10	1:25:04 PM	Bubbler valve closed
2/19/10	1:25:04 PM	Helium MFC set to  0.000000
2/19/10	1:25:04 PM	H2 MFC set to  0.000000
2/19/10	1:25:04 PM	BCl3 MFC set to  0.000000
2/19/10	1:25:04 PM	SiCl4 MFC set to  0.000000
2/19/10	1:25:04 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:25:04 PM	Tube furnace set to 0
2/19/10	1:25:05 PM	Run finished at 1:25 PM
2/19/10	1:25:23 PM	Recipe started at 1:25 PM
2/19/10	1:25:23 PM	Helium valve closed
2/19/10	1:25:23 PM	BCl3 valve closed
2/19/10	1:25:23 PM	PH3 valve closed
2/19/10	1:25:23 PM	SiCl4 pre valve closed
2/19/10	1:25:23 PM	SiCl4 post valve closed
2/19/10	1:25:23 PM	Main Vac valve closed
2/19/10	1:25:23 PM	Bypass valve closed
2/19/10	1:25:23 PM	Bubbler valve closed
2/19/10	1:25:23 PM	H2 valve opened
2/19/10	1:25:23 PM	Helium MFC set to  0.000000
2/19/10	1:25:23 PM	H2 MFC set to  0.000000
2/19/10	1:25:23 PM	BCl3 MFC set to  0.000000
2/19/10	1:25:23 PM	SiCl4 MFC set to  0.000000
2/19/10	1:25:23 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:25:23 PM	Tube furnace set to 0
2/19/10	1:25:27 PM	H2 valve closed
2/19/10	1:25:27 PM	BCl3 valve closed
2/19/10	1:25:27 PM	PH3 valve closed
2/19/10	1:25:27 PM	SiCl4 pre valve closed
2/19/10	1:25:27 PM	SiCl4 post valve closed
2/19/10	1:25:27 PM	Main Vac valve closed
2/19/10	1:25:27 PM	Bypass valve closed
2/19/10	1:25:27 PM	Bubbler valve closed
2/19/10	1:25:27 PM	Helium valve opened
2/19/10	1:25:27 PM	Helium MFC set to  0.000000
2/19/10	1:25:27 PM	H2 MFC set to  0.000000
2/19/10	1:25:27 PM	BCl3 MFC set to  0.000000
2/19/10	1:25:27 PM	SiCl4 MFC set to  0.000000
2/19/10	1:25:27 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:25:27 PM	Tube furnace set to 0
2/19/10	1:25:30 PM	Helium valve closed
2/19/10	1:25:30 PM	H2 valve closed
2/19/10	1:25:30 PM	BCl3 valve closed
2/19/10	1:25:30 PM	PH3 valve closed
2/19/10	1:25:30 PM	SiCl4 pre valve closed
2/19/10	1:25:30 PM	SiCl4 post valve closed
2/19/10	1:25:30 PM	Main Vac valve closed
2/19/10	1:25:30 PM	Bypass valve closed
2/19/10	1:25:30 PM	Bubbler valve opened
2/19/10	1:25:30 PM	Helium MFC set to  0.000000
2/19/10	1:25:30 PM	H2 MFC set to  0.000000
2/19/10	1:25:30 PM	BCl3 MFC set to  0.000000
2/19/10	1:25:30 PM	SiCl4 MFC set to  0.000000
2/19/10	1:25:30 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:25:30 PM	Tube furnace set to 0
2/19/10	1:25:33 PM	Run finished at 1:25 PM
2/19/10	1:36:07 PM	Recipe started at 1:36 PM
2/19/10	1:36:07 PM	Helium valve closed
2/19/10	1:36:07 PM	BCl3 valve closed
2/19/10	1:36:07 PM	PH3 valve closed
2/19/10	1:36:07 PM	SiCl4 pre valve closed
2/19/10	1:36:07 PM	SiCl4 post valve closed
2/19/10	1:36:07 PM	Main Vac valve closed
2/19/10	1:36:07 PM	Bypass valve closed
2/19/10	1:36:07 PM	Bubbler valve closed
2/19/10	1:36:07 PM	H2 valve opened
2/19/10	1:36:07 PM	Helium MFC set to  0.000000
2/19/10	1:36:07 PM	H2 MFC set to  0.000000
2/19/10	1:36:07 PM	BCl3 MFC set to  0.000000
2/19/10	1:36:07 PM	SiCl4 MFC set to  0.000000
2/19/10	1:36:07 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:36:07 PM	Tube furnace set to 0
2/19/10	1:36:10 PM	H2 valve closed
2/19/10	1:36:10 PM	BCl3 valve closed
2/19/10	1:36:10 PM	PH3 valve closed
2/19/10	1:36:10 PM	SiCl4 pre valve closed
2/19/10	1:36:10 PM	SiCl4 post valve closed
2/19/10	1:36:10 PM	Main Vac valve closed
2/19/10	1:36:10 PM	Bypass valve closed
2/19/10	1:36:10 PM	Bubbler valve closed
2/19/10	1:36:10 PM	Helium valve opened
2/19/10	1:36:10 PM	Helium MFC set to  0.000000
2/19/10	1:36:10 PM	H2 MFC set to  0.000000
2/19/10	1:36:10 PM	BCl3 MFC set to  0.000000
2/19/10	1:36:10 PM	SiCl4 MFC set to  0.000000
2/19/10	1:36:11 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:36:11 PM	Tube furnace set to 0
2/19/10	1:36:14 PM	Helium valve closed
2/19/10	1:36:14 PM	H2 valve closed
2/19/10	1:36:14 PM	BCl3 valve closed
2/19/10	1:36:14 PM	PH3 valve closed
2/19/10	1:36:14 PM	SiCl4 pre valve closed
2/19/10	1:36:14 PM	SiCl4 post valve closed
2/19/10	1:36:14 PM	Main Vac valve closed
2/19/10	1:36:14 PM	Bypass valve closed
2/19/10	1:36:14 PM	Bubbler valve opened
2/19/10	1:36:14 PM	Helium MFC set to  0.000000
2/19/10	1:36:14 PM	H2 MFC set to  0.000000
2/19/10	1:36:14 PM	BCl3 MFC set to  0.000000
2/19/10	1:36:14 PM	SiCl4 MFC set to  0.000000
2/19/10	1:36:14 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:36:14 PM	Tube furnace set to 0
2/19/10	1:36:17 PM	Run finished at 1:36 PM
2/19/10	1:36:36 PM	Recipe started at 1:36 PM
2/19/10	1:36:36 PM	Helium valve closed
2/19/10	1:36:36 PM	BCl3 valve closed
2/19/10	1:36:36 PM	PH3 valve closed
2/19/10	1:36:36 PM	SiCl4 pre valve closed
2/19/10	1:36:36 PM	SiCl4 post valve closed
2/19/10	1:36:36 PM	Main Vac valve closed
2/19/10	1:36:36 PM	Bypass valve closed
2/19/10	1:36:36 PM	Bubbler valve closed
2/19/10	1:36:36 PM	H2 valve opened
2/19/10	1:36:36 PM	Helium MFC set to  0.000000
2/19/10	1:36:36 PM	H2 MFC set to  0.000000
2/19/10	1:36:36 PM	BCl3 MFC set to  0.000000
2/19/10	1:36:36 PM	SiCl4 MFC set to  0.000000
2/19/10	1:36:36 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:36:36 PM	Tube furnace set to 0
2/19/10	1:36:41 PM	H2 valve closed
2/19/10	1:36:41 PM	BCl3 valve closed
2/19/10	1:36:41 PM	PH3 valve closed
2/19/10	1:36:41 PM	SiCl4 pre valve closed
2/19/10	1:36:41 PM	SiCl4 post valve closed
2/19/10	1:36:41 PM	Main Vac valve closed
2/19/10	1:36:41 PM	Bypass valve closed
2/19/10	1:36:41 PM	Bubbler valve closed
2/19/10	1:36:41 PM	Helium valve opened
2/19/10	1:36:41 PM	Helium MFC set to  0.000000
2/19/10	1:36:41 PM	H2 MFC set to  0.000000
2/19/10	1:36:41 PM	BCl3 MFC set to  0.000000
2/19/10	1:36:41 PM	SiCl4 MFC set to  0.000000
2/19/10	1:36:41 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:36:41 PM	Tube furnace set to 0
2/19/10	1:36:42 PM	Helium valve closed
2/19/10	1:36:42 PM	H2 valve closed
2/19/10	1:36:42 PM	BCl3 valve closed
2/19/10	1:36:42 PM	PH3 valve closed
2/19/10	1:36:42 PM	SiCl4 pre valve closed
2/19/10	1:36:42 PM	SiCl4 post valve closed
2/19/10	1:36:42 PM	Main Vac valve closed
2/19/10	1:36:42 PM	Bypass valve closed
2/19/10	1:36:42 PM	Bubbler valve opened
2/19/10	1:36:42 PM	Helium MFC set to  0.000000
2/19/10	1:36:42 PM	H2 MFC set to  0.000000
2/19/10	1:36:42 PM	BCl3 MFC set to  0.000000
2/19/10	1:36:42 PM	SiCl4 MFC set to  0.000000
2/19/10	1:36:42 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:36:42 PM	Tube furnace set to 0
2/19/10	1:36:48 PM	Run finished at 1:36 PM
2/19/10	1:37:03 PM	Recipe started at 1:37 PM
2/19/10	1:37:03 PM	Helium valve closed
2/19/10	1:37:03 PM	BCl3 valve closed
2/19/10	1:37:03 PM	PH3 valve closed
2/19/10	1:37:03 PM	SiCl4 pre valve closed
2/19/10	1:37:03 PM	SiCl4 post valve closed
2/19/10	1:37:03 PM	Main Vac valve closed
2/19/10	1:37:03 PM	Bypass valve closed
2/19/10	1:37:03 PM	Bubbler valve closed
2/19/10	1:37:03 PM	H2 valve opened
2/19/10	1:37:03 PM	Helium MFC set to  0.000000
2/19/10	1:37:03 PM	H2 MFC set to  0.000000
2/19/10	1:37:03 PM	BCl3 MFC set to  0.000000
2/19/10	1:37:03 PM	SiCl4 MFC set to  0.000000
2/19/10	1:37:03 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:37:03 PM	Tube furnace set to 0
2/19/10	1:37:09 PM	H2 valve closed
2/19/10	1:37:09 PM	BCl3 valve closed
2/19/10	1:37:09 PM	PH3 valve closed
2/19/10	1:37:09 PM	SiCl4 pre valve closed
2/19/10	1:37:09 PM	SiCl4 post valve closed
2/19/10	1:37:09 PM	Main Vac valve closed
2/19/10	1:37:09 PM	Bypass valve closed
2/19/10	1:37:09 PM	Bubbler valve closed
2/19/10	1:37:09 PM	Helium valve opened
2/19/10	1:37:09 PM	Helium MFC set to  0.000000
2/19/10	1:37:09 PM	H2 MFC set to  0.000000
2/19/10	1:37:09 PM	BCl3 MFC set to  0.000000
2/19/10	1:37:09 PM	SiCl4 MFC set to  0.000000
2/19/10	1:37:09 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:37:09 PM	Tube furnace set to 0
2/19/10	1:37:14 PM	Helium valve closed
2/19/10	1:37:14 PM	H2 valve closed
2/19/10	1:37:14 PM	BCl3 valve closed
2/19/10	1:37:14 PM	PH3 valve closed
2/19/10	1:37:14 PM	SiCl4 pre valve closed
2/19/10	1:37:14 PM	SiCl4 post valve closed
2/19/10	1:37:14 PM	Main Vac valve closed
2/19/10	1:37:14 PM	Bypass valve closed
2/19/10	1:37:14 PM	Bubbler valve opened
2/19/10	1:37:14 PM	Helium MFC set to  0.000000
2/19/10	1:37:14 PM	H2 MFC set to  0.000000
2/19/10	1:37:14 PM	BCl3 MFC set to  0.000000
2/19/10	1:37:14 PM	SiCl4 MFC set to  0.000000
2/19/10	1:37:14 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:37:14 PM	Tube furnace set to 0
2/19/10	1:37:19 PM	Run finished at 1:37 PM
2/19/10	1:37:30 PM	Recipe started at 1:37 PM
2/19/10	1:37:30 PM	Helium valve closed
2/19/10	1:37:30 PM	BCl3 valve closed
2/19/10	1:37:30 PM	PH3 valve closed
2/19/10	1:37:30 PM	SiCl4 pre valve closed
2/19/10	1:37:30 PM	SiCl4 post valve closed
2/19/10	1:37:30 PM	Main Vac valve closed
2/19/10	1:37:30 PM	Bypass valve closed
2/19/10	1:37:30 PM	Bubbler valve closed
2/19/10	1:37:30 PM	H2 valve opened
2/19/10	1:37:30 PM	Helium MFC set to  0.000000
2/19/10	1:37:30 PM	H2 MFC set to  0.000000
2/19/10	1:37:30 PM	BCl3 MFC set to  0.000000
2/19/10	1:37:30 PM	SiCl4 MFC set to  0.000000
2/19/10	1:37:30 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:37:30 PM	Tube furnace set to 0
2/19/10	1:37:36 PM	H2 valve closed
2/19/10	1:37:36 PM	BCl3 valve closed
2/19/10	1:37:36 PM	PH3 valve closed
2/19/10	1:37:36 PM	SiCl4 pre valve closed
2/19/10	1:37:36 PM	SiCl4 post valve closed
2/19/10	1:37:36 PM	Main Vac valve closed
2/19/10	1:37:36 PM	Bypass valve closed
2/19/10	1:37:36 PM	Bubbler valve closed
2/19/10	1:37:36 PM	Helium valve opened
2/19/10	1:37:36 PM	Helium MFC set to  0.000000
2/19/10	1:37:36 PM	H2 MFC set to  0.000000
2/19/10	1:37:36 PM	BCl3 MFC set to  0.000000
2/19/10	1:37:36 PM	SiCl4 MFC set to  0.000000
2/19/10	1:37:36 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:37:36 PM	Tube furnace set to 0
2/19/10	1:38:16 PM	Helium valve closed
2/19/10	1:38:16 PM	H2 valve closed
2/19/10	1:38:16 PM	BCl3 valve closed
2/19/10	1:38:16 PM	PH3 valve closed
2/19/10	1:38:16 PM	SiCl4 pre valve closed
2/19/10	1:38:16 PM	SiCl4 post valve closed
2/19/10	1:38:16 PM	Main Vac valve closed
2/19/10	1:38:16 PM	Bypass valve closed
2/19/10	1:38:16 PM	Bubbler valve opened
2/19/10	1:38:16 PM	Helium MFC set to  0.000000
2/19/10	1:38:16 PM	H2 MFC set to  0.000000
2/19/10	1:38:16 PM	BCl3 MFC set to  0.000000
2/19/10	1:38:16 PM	SiCl4 MFC set to  0.000000
2/19/10	1:38:16 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:38:16 PM	Tube furnace set to 0
2/19/10	1:38:21 PM	Run finished at 1:38 PM
2/19/10	1:38:43 PM	Program exited cleanly
2/19/10	1:39:00 PM	Program started normally
2/19/10	1:39:00 PM	Helium valve closed
2/19/10	1:39:00 PM	H2 valve closed
2/19/10	1:39:00 PM	BCl3 valve closed
2/19/10	1:39:00 PM	PH3 valve closed
2/19/10	1:39:00 PM	SiCl4 pre valve closed
2/19/10	1:39:00 PM	SiCl4 post valve closed
2/19/10	1:39:00 PM	Main Vac valve closed
2/19/10	1:39:00 PM	Bypass valve closed
2/19/10	1:39:00 PM	Bubbler valve closed
2/19/10	1:39:00 PM	Helium MFC set to  0.000000
2/19/10	1:39:00 PM	H2 MFC set to  0.000000
2/19/10	1:39:00 PM	BCl3 MFC set to  0.000000
2/19/10	1:39:00 PM	SiCl4 MFC set to  0.000000
2/19/10	1:39:00 PM	Bypass solenoid MFC set to  760.000000
2/19/10	1:39:00 PM	Tube furnace set to 0
2/19/10	1:39:13 PM	Recipe started at 1:39 PM
2/19/10	1:39:13 PM	Helium valve closed
2/19/10	1:39:13 PM	H2 valve closed
2/19/10	1:39:13 PM	BCl3 valve closed
2/19/10	1:39:13 PM	PH3 valve closed
2/19/10	1:39:13 PM	SiCl4 pre valve closed
2/19/10	1:39:13 PM	SiCl4 post valve closed
2/19/10	1:39:13 PM	Main Vac valve closed
2/19/10	1:39:13 PM	Bypass valve closed
2/19/10	1:39:13 PM	Bubbler valve closed
2/19/10	1:39:13 PM	Helium MFC set to  0.000000
2/19/10	1:39:13 PM	H2 MFC set to  0.000000
2/19/10	1:39:13 PM	BCl3 MFC set to  0.000000
2/19/10	1:39:13 PM	SiCl4 MFC set to  0.000000
2/19/10	1:39:13 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:39:13 PM	Tube furnace set to 0
2/19/10	1:39:18 PM	Helium valve closed
2/19/10	1:39:18 PM	H2 valve closed
2/19/10	1:39:18 PM	BCl3 valve closed
2/19/10	1:39:18 PM	PH3 valve closed
2/19/10	1:39:18 PM	SiCl4 pre valve closed
2/19/10	1:39:18 PM	SiCl4 post valve closed
2/19/10	1:39:18 PM	Main Vac valve closed
2/19/10	1:39:18 PM	Bypass valve closed
2/19/10	1:39:18 PM	Bubbler valve closed
2/19/10	1:39:18 PM	Helium MFC set to  0.000000
2/19/10	1:39:18 PM	H2 MFC set to  0.000000
2/19/10	1:39:18 PM	BCl3 MFC set to  0.000000
2/19/10	1:39:18 PM	SiCl4 MFC set to  0.000000
2/19/10	1:39:18 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:39:18 PM	Tube furnace set to 0
2/19/10	1:39:23 PM	Helium valve closed
2/19/10	1:39:23 PM	H2 valve closed
2/19/10	1:39:23 PM	BCl3 valve closed
2/19/10	1:39:23 PM	PH3 valve closed
2/19/10	1:39:23 PM	SiCl4 pre valve closed
2/19/10	1:39:23 PM	SiCl4 post valve closed
2/19/10	1:39:23 PM	Main Vac valve closed
2/19/10	1:39:23 PM	Bypass valve closed
2/19/10	1:39:23 PM	Bubbler valve closed
2/19/10	1:39:23 PM	Helium MFC set to  0.000000
2/19/10	1:39:23 PM	H2 MFC set to  0.000000
2/19/10	1:39:23 PM	BCl3 MFC set to  0.000000
2/19/10	1:39:23 PM	SiCl4 MFC set to  0.000000
2/19/10	1:39:23 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:39:23 PM	Tube furnace set to 0
2/19/10	1:39:29 PM	Run finished at 1:39 PM
2/19/10	1:39:34 PM	Recipe started at 1:39 PM
2/19/10	1:39:34 PM	Helium valve closed
2/19/10	1:39:34 PM	H2 valve closed
2/19/10	1:39:34 PM	BCl3 valve closed
2/19/10	1:39:34 PM	PH3 valve closed
2/19/10	1:39:34 PM	SiCl4 pre valve closed
2/19/10	1:39:34 PM	SiCl4 post valve closed
2/19/10	1:39:34 PM	Main Vac valve closed
2/19/10	1:39:34 PM	Bypass valve closed
2/19/10	1:39:34 PM	Bubbler valve closed
2/19/10	1:39:34 PM	Helium MFC set to  0.000000
2/19/10	1:39:34 PM	H2 MFC set to  0.000000
2/19/10	1:39:34 PM	BCl3 MFC set to  0.000000
2/19/10	1:39:34 PM	SiCl4 MFC set to  0.000000
2/19/10	1:39:34 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:39:34 PM	Tube furnace set to 0
2/19/10	1:39:40 PM	Helium valve closed
2/19/10	1:39:40 PM	H2 valve closed
2/19/10	1:39:40 PM	BCl3 valve closed
2/19/10	1:39:40 PM	PH3 valve closed
2/19/10	1:39:40 PM	SiCl4 pre valve closed
2/19/10	1:39:40 PM	SiCl4 post valve closed
2/19/10	1:39:40 PM	Main Vac valve closed
2/19/10	1:39:40 PM	Bypass valve closed
2/19/10	1:39:40 PM	Bubbler valve closed
2/19/10	1:39:40 PM	Helium MFC set to  0.000000
2/19/10	1:39:40 PM	H2 MFC set to  0.000000
2/19/10	1:39:40 PM	BCl3 MFC set to  0.000000
2/19/10	1:39:40 PM	SiCl4 MFC set to  0.000000
2/19/10	1:39:40 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:39:40 PM	Tube furnace set to 0
2/19/10	1:39:45 PM	Helium valve closed
2/19/10	1:39:45 PM	H2 valve closed
2/19/10	1:39:45 PM	BCl3 valve closed
2/19/10	1:39:45 PM	PH3 valve closed
2/19/10	1:39:45 PM	SiCl4 pre valve closed
2/19/10	1:39:45 PM	SiCl4 post valve closed
2/19/10	1:39:45 PM	Main Vac valve closed
2/19/10	1:39:45 PM	Bypass valve closed
2/19/10	1:39:45 PM	Bubbler valve closed
2/19/10	1:39:45 PM	Helium MFC set to  0.000000
2/19/10	1:39:45 PM	H2 MFC set to  0.000000
2/19/10	1:39:45 PM	BCl3 MFC set to  0.000000
2/19/10	1:39:45 PM	SiCl4 MFC set to  0.000000
2/19/10	1:39:45 PM	Bypass solenoid MFC set to  0.000000
2/19/10	1:39:45 PM	Tube furnace set to 0
2/19/10	1:39:50 PM	Run finished at 1:39 PM
2/19/10	1:39:55 PM	Program exited cleanly
2/19/10	5:41:13 PM	Program started normally
2/19/10	5:41:14 PM	Helium valve closed
2/19/10	5:41:14 PM	H2 valve closed
2/19/10	5:41:14 PM	BCl3 valve closed
2/19/10	5:41:14 PM	PH3 valve closed
2/19/10	5:41:14 PM	SiCl4 pre valve closed
2/19/10	5:41:14 PM	SiCl4 post valve closed
2/19/10	5:41:14 PM	Main Vac valve closed
2/19/10	5:41:14 PM	Bypass valve closed
2/19/10	5:41:14 PM	Bubbler valve closed
2/19/10	5:41:14 PM	Helium MFC set to  0.000000
2/19/10	5:41:14 PM	H2 MFC set to  0.000000
2/19/10	5:41:14 PM	BCl3 MFC set to  0.000000
2/19/10	5:41:14 PM	SiCl4 MFC set to  0.000000
2/19/10	5:41:14 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:41:14 PM	Tube furnace set to 0
2/19/10	5:41:30 PM	Program exited cleanly
2/19/10	5:41:51 PM	Program started normally
2/19/10	5:41:51 PM	Helium valve closed
2/19/10	5:41:51 PM	H2 valve closed
2/19/10	5:41:51 PM	BCl3 valve closed
2/19/10	5:41:51 PM	PH3 valve closed
2/19/10	5:41:51 PM	SiCl4 pre valve closed
2/19/10	5:41:51 PM	SiCl4 post valve closed
2/19/10	5:41:51 PM	Main Vac valve closed
2/19/10	5:41:51 PM	Bypass valve closed
2/19/10	5:41:51 PM	Bubbler valve closed
2/19/10	5:41:51 PM	Helium MFC set to  0.000000
2/19/10	5:41:51 PM	H2 MFC set to  0.000000
2/19/10	5:41:51 PM	BCl3 MFC set to  0.000000
2/19/10	5:41:51 PM	SiCl4 MFC set to  0.000000
2/19/10	5:41:51 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:41:51 PM	Tube furnace set to 0
2/19/10	5:42:15 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:43:00 PM	Program started after a nonstandard shutdown
2/19/10	5:43:00 PM	Helium valve closed
2/19/10	5:43:00 PM	H2 valve closed
2/19/10	5:43:00 PM	BCl3 valve closed
2/19/10	5:43:00 PM	PH3 valve closed
2/19/10	5:43:00 PM	SiCl4 pre valve closed
2/19/10	5:43:00 PM	SiCl4 post valve closed
2/19/10	5:43:00 PM	Main Vac valve closed
2/19/10	5:43:00 PM	Bypass valve closed
2/19/10	5:43:00 PM	Bubbler valve closed
2/19/10	5:43:00 PM	Helium MFC set to  0.000000
2/19/10	5:43:00 PM	H2 MFC set to  0.000000
2/19/10	5:43:00 PM	BCl3 MFC set to  0.000000
2/19/10	5:43:00 PM	SiCl4 MFC set to  0.000000
2/19/10	5:43:00 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:43:00 PM	Tube furnace set to 0
2/19/10	5:43:05 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:46:05 PM	Program started after a nonstandard shutdown
2/19/10	5:46:05 PM	Helium valve closed
2/19/10	5:46:05 PM	H2 valve closed
2/19/10	5:46:05 PM	BCl3 valve closed
2/19/10	5:46:05 PM	PH3 valve closed
2/19/10	5:46:05 PM	SiCl4 pre valve closed
2/19/10	5:46:05 PM	SiCl4 post valve closed
2/19/10	5:46:05 PM	Main Vac valve closed
2/19/10	5:46:05 PM	Bypass valve closed
2/19/10	5:46:05 PM	Bubbler valve closed
2/19/10	5:46:05 PM	Helium MFC set to  0.000000
2/19/10	5:46:05 PM	H2 MFC set to  0.000000
2/19/10	5:46:05 PM	BCl3 MFC set to  0.000000
2/19/10	5:46:05 PM	SiCl4 MFC set to  0.000000
2/19/10	5:46:05 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:46:05 PM	Tube furnace set to 0
2/19/10	5:46:31 PM	Recipe started at 5:46 PM
2/19/10	5:46:31 PM	H2 valve closed
2/19/10	5:46:31 PM	BCl3 valve closed
2/19/10	5:46:31 PM	PH3 valve closed
2/19/10	5:46:31 PM	SiCl4 pre valve closed
2/19/10	5:46:31 PM	SiCl4 post valve closed
2/19/10	5:46:31 PM	Main Vac valve closed
2/19/10	5:46:31 PM	Bypass valve closed
2/19/10	5:46:31 PM	Bubbler valve closed
2/19/10	5:46:31 PM	Helium valve opened
2/19/10	5:46:31 PM	Helium MFC set to  500.000000
2/19/10	5:46:31 PM	H2 MFC set to  0.000000
2/19/10	5:46:31 PM	BCl3 MFC set to  0.000000
2/19/10	5:46:31 PM	SiCl4 MFC set to  0.000000
2/19/10	5:46:31 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:46:31 PM	Tube furnace set to 0
2/19/10	5:46:40 PM	Helium valve closed
2/19/10	5:46:40 PM	H2 valve closed
2/19/10	5:46:40 PM	BCl3 valve closed
2/19/10	5:46:40 PM	PH3 valve closed
2/19/10	5:46:40 PM	SiCl4 pre valve closed
2/19/10	5:46:40 PM	SiCl4 post valve closed
2/19/10	5:46:40 PM	Main Vac valve closed
2/19/10	5:46:40 PM	Bypass valve closed
2/19/10	5:46:40 PM	Bubbler valve closed
2/19/10	5:46:40 PM	Helium MFC set to  0.000000
2/19/10	5:46:40 PM	H2 MFC set to  0.000000
2/19/10	5:46:40 PM	BCl3 MFC set to  0.000000
2/19/10	5:46:40 PM	SiCl4 MFC set to  0.000000
2/19/10	5:46:40 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:46:40 PM	Tube furnace set to 0
2/19/10	5:46:41 PM	Run finished at 5:46 PM
2/19/10	5:46:50 PM	Program exited cleanly
2/19/10	5:46:52 PM	Program started normally
2/19/10	5:46:52 PM	Helium valve closed
2/19/10	5:46:52 PM	H2 valve closed
2/19/10	5:46:52 PM	BCl3 valve closed
2/19/10	5:46:52 PM	PH3 valve closed
2/19/10	5:46:52 PM	SiCl4 pre valve closed
2/19/10	5:46:52 PM	SiCl4 post valve closed
2/19/10	5:46:52 PM	Main Vac valve closed
2/19/10	5:46:52 PM	Bypass valve closed
2/19/10	5:46:52 PM	Bubbler valve closed
2/19/10	5:46:52 PM	Helium MFC set to  0.000000
2/19/10	5:46:52 PM	H2 MFC set to  0.000000
2/19/10	5:46:52 PM	BCl3 MFC set to  0.000000
2/19/10	5:46:52 PM	SiCl4 MFC set to  0.000000
2/19/10	5:46:52 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:46:52 PM	Tube furnace set to 0
2/19/10	5:46:54 PM	Recipe started at 5:46 PM
2/19/10	5:46:54 PM	Helium valve closed
2/19/10	5:46:54 PM	H2 valve closed
2/19/10	5:46:54 PM	BCl3 valve closed
2/19/10	5:46:54 PM	PH3 valve closed
2/19/10	5:46:54 PM	SiCl4 pre valve closed
2/19/10	5:46:54 PM	SiCl4 post valve closed
2/19/10	5:46:54 PM	Main Vac valve closed
2/19/10	5:46:54 PM	Bypass valve closed
2/19/10	5:46:54 PM	Bubbler valve closed
2/19/10	5:46:54 PM	Helium MFC set to  0.000000
2/19/10	5:46:54 PM	H2 MFC set to  0.000000
2/19/10	5:46:54 PM	BCl3 MFC set to  0.000000
2/19/10	5:46:54 PM	SiCl4 MFC set to  0.000000
2/19/10	5:46:54 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:46:54 PM	Tube furnace set to 0
2/19/10	5:46:55 PM	Run finished at 5:46 PM
2/19/10	5:47:05 PM	Recipe started at 5:47 PM
2/19/10	5:47:05 PM	Helium valve closed
2/19/10	5:47:05 PM	H2 valve closed
2/19/10	5:47:05 PM	BCl3 valve closed
2/19/10	5:47:05 PM	PH3 valve closed
2/19/10	5:47:05 PM	SiCl4 pre valve closed
2/19/10	5:47:05 PM	SiCl4 post valve closed
2/19/10	5:47:05 PM	Main Vac valve closed
2/19/10	5:47:05 PM	Bubbler valve closed
2/19/10	5:47:05 PM	Bypass valve opened
2/19/10	5:47:05 PM	Helium MFC set to  0.000000
2/19/10	5:47:05 PM	H2 MFC set to  0.000000
2/19/10	5:47:05 PM	BCl3 MFC set to  0.000000
2/19/10	5:47:05 PM	SiCl4 MFC set to  0.000000
2/19/10	5:47:05 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:47:05 PM	Tube furnace set to 0
2/19/10	5:47:25 PM	Helium valve closed
2/19/10	5:47:25 PM	H2 valve closed
2/19/10	5:47:25 PM	BCl3 valve closed
2/19/10	5:47:25 PM	PH3 valve closed
2/19/10	5:47:25 PM	SiCl4 pre valve closed
2/19/10	5:47:26 PM	SiCl4 post valve closed
2/19/10	5:47:26 PM	Bubbler valve closed
2/19/10	5:47:26 PM	Main Vac valve opened
2/19/10	5:47:26 PM	Bypass valve opened
2/19/10	5:47:26 PM	Helium MFC set to  0.000000
2/19/10	5:47:26 PM	H2 MFC set to  0.000000
2/19/10	5:47:26 PM	BCl3 MFC set to  0.000000
2/19/10	5:47:26 PM	SiCl4 MFC set to  0.000000
2/19/10	5:47:26 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:47:26 PM	Tube furnace set to 0
2/19/10	5:47:26 PM	Run finished at 5:47 PM
2/19/10	5:47:40 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:pumpdown.xml
2/19/10	5:47:43 PM	Helium valve closed
2/19/10	5:47:43 PM	H2 valve closed
2/19/10	5:47:43 PM	BCl3 valve closed
2/19/10	5:47:43 PM	PH3 valve closed
2/19/10	5:47:43 PM	SiCl4 pre valve closed
2/19/10	5:47:43 PM	SiCl4 post valve closed
2/19/10	5:47:43 PM	Main Vac valve closed
2/19/10	5:47:43 PM	Bubbler valve closed
2/19/10	5:47:43 PM	Bypass valve opened
2/19/10	5:47:43 PM	Helium MFC set to  0.000000
2/19/10	5:47:43 PM	H2 MFC set to  0.000000
2/19/10	5:47:43 PM	BCl3 MFC set to  0.000000
2/19/10	5:47:43 PM	SiCl4 MFC set to  0.000000
2/19/10	5:47:43 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:47:43 PM	Tube furnace set to 0
2/19/10	5:47:43 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:47:44 PM	Helium valve closed
2/19/10	5:47:44 PM	H2 valve closed
2/19/10	5:47:44 PM	BCl3 valve closed
2/19/10	5:47:44 PM	PH3 valve closed
2/19/10	5:47:44 PM	SiCl4 pre valve closed
2/19/10	5:47:44 PM	SiCl4 post valve closed
2/19/10	5:47:44 PM	Bubbler valve closed
2/19/10	5:47:44 PM	Main Vac valve opened
2/19/10	5:47:44 PM	Bypass valve opened
2/19/10	5:47:44 PM	Helium MFC set to  0.000000
2/19/10	5:47:44 PM	H2 MFC set to  0.000000
2/19/10	5:47:44 PM	BCl3 MFC set to  0.000000
2/19/10	5:47:44 PM	SiCl4 MFC set to  0.000000
2/19/10	5:47:44 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:47:44 PM	Tube furnace set to 0
2/19/10	5:47:44 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:47:44 PM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:pumpdown.xml
2/19/10	5:48:39 PM	Program exited cleanly
2/19/10	5:48:46 PM	Program started normally
2/19/10	5:48:47 PM	Helium valve closed
2/19/10	5:48:47 PM	H2 valve closed
2/19/10	5:48:47 PM	BCl3 valve closed
2/19/10	5:48:47 PM	PH3 valve closed
2/19/10	5:48:47 PM	SiCl4 pre valve closed
2/19/10	5:48:47 PM	SiCl4 post valve closed
2/19/10	5:48:47 PM	Main Vac valve closed
2/19/10	5:48:47 PM	Bypass valve closed
2/19/10	5:48:47 PM	Bubbler valve closed
2/19/10	5:48:47 PM	Helium MFC set to  0.000000
2/19/10	5:48:47 PM	H2 MFC set to  0.000000
2/19/10	5:48:47 PM	BCl3 MFC set to  0.000000
2/19/10	5:48:47 PM	SiCl4 MFC set to  0.000000
2/19/10	5:48:47 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:48:47 PM	Tube furnace set to 0
2/19/10	5:48:58 PM	Program exited cleanly
2/19/10	5:49:11 PM	Program started normally
2/19/10	5:49:11 PM	Helium valve closed
2/19/10	5:49:11 PM	H2 valve closed
2/19/10	5:49:11 PM	BCl3 valve closed
2/19/10	5:49:11 PM	PH3 valve closed
2/19/10	5:49:11 PM	SiCl4 pre valve closed
2/19/10	5:49:11 PM	SiCl4 post valve closed
2/19/10	5:49:11 PM	Main Vac valve closed
2/19/10	5:49:11 PM	Bypass valve closed
2/19/10	5:49:11 PM	Bubbler valve closed
2/19/10	5:49:11 PM	Helium MFC set to  0.000000
2/19/10	5:49:11 PM	H2 MFC set to  0.000000
2/19/10	5:49:11 PM	BCl3 MFC set to  0.000000
2/19/10	5:49:11 PM	SiCl4 MFC set to  0.000000
2/19/10	5:49:11 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:49:11 PM	Tube furnace set to 0
2/19/10	5:49:21 PM	Program exited cleanly
2/19/10	5:49:23 PM	Program started normally
2/19/10	5:49:23 PM	Helium valve closed
2/19/10	5:49:23 PM	H2 valve closed
2/19/10	5:49:23 PM	BCl3 valve closed
2/19/10	5:49:23 PM	PH3 valve closed
2/19/10	5:49:23 PM	SiCl4 pre valve closed
2/19/10	5:49:23 PM	SiCl4 post valve closed
2/19/10	5:49:23 PM	Main Vac valve closed
2/19/10	5:49:23 PM	Bypass valve closed
2/19/10	5:49:23 PM	Bubbler valve closed
2/19/10	5:49:23 PM	Helium MFC set to  0.000000
2/19/10	5:49:23 PM	H2 MFC set to  0.000000
2/19/10	5:49:23 PM	BCl3 MFC set to  0.000000
2/19/10	5:49:23 PM	SiCl4 MFC set to  0.000000
2/19/10	5:49:23 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:49:23 PM	Tube furnace set to 0
2/19/10	5:49:30 PM	Program exited cleanly
2/19/10	5:49:57 PM	Program started normally
2/19/10	5:49:57 PM	Helium valve closed
2/19/10	5:49:57 PM	H2 valve closed
2/19/10	5:49:57 PM	BCl3 valve closed
2/19/10	5:49:57 PM	PH3 valve closed
2/19/10	5:49:57 PM	SiCl4 pre valve closed
2/19/10	5:49:57 PM	SiCl4 post valve closed
2/19/10	5:49:57 PM	Main Vac valve closed
2/19/10	5:49:57 PM	Bypass valve closed
2/19/10	5:49:57 PM	Bubbler valve closed
2/19/10	5:49:57 PM	Helium MFC set to  0.000000
2/19/10	5:49:57 PM	H2 MFC set to  0.000000
2/19/10	5:49:57 PM	BCl3 MFC set to  0.000000
2/19/10	5:49:57 PM	SiCl4 MFC set to  0.000000
2/19/10	5:49:57 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:49:57 PM	Tube furnace set to 0
2/19/10	5:50:19 PM	Program exited cleanly
2/19/10	5:50:21 PM	Program started normally
2/19/10	5:50:21 PM	Helium valve closed
2/19/10	5:50:21 PM	H2 valve closed
2/19/10	5:50:21 PM	BCl3 valve closed
2/19/10	5:50:21 PM	PH3 valve closed
2/19/10	5:50:21 PM	SiCl4 pre valve closed
2/19/10	5:50:21 PM	SiCl4 post valve closed
2/19/10	5:50:21 PM	Main Vac valve closed
2/19/10	5:50:21 PM	Bypass valve closed
2/19/10	5:50:21 PM	Bubbler valve closed
2/19/10	5:50:21 PM	Helium MFC set to  0.000000
2/19/10	5:50:21 PM	H2 MFC set to  0.000000
2/19/10	5:50:21 PM	BCl3 MFC set to  0.000000
2/19/10	5:50:21 PM	SiCl4 MFC set to  0.000000
2/19/10	5:50:21 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:50:21 PM	Tube furnace set to 0
2/19/10	5:50:24 PM	Bypass valve opened
2/19/10	5:50:24 PM	Bypass valve closed
2/19/10	5:50:26 PM	Program exited cleanly
2/19/10	5:52:29 PM	Program started normally
2/19/10	5:52:29 PM	Helium valve closed
2/19/10	5:52:29 PM	H2 valve closed
2/19/10	5:52:29 PM	BCl3 valve closed
2/19/10	5:52:29 PM	PH3 valve closed
2/19/10	5:52:29 PM	SiCl4 pre valve closed
2/19/10	5:52:29 PM	SiCl4 post valve closed
2/19/10	5:52:29 PM	Main Vac valve closed
2/19/10	5:52:29 PM	Bypass valve closed
2/19/10	5:52:29 PM	Bubbler valve closed
2/19/10	5:52:29 PM	Helium MFC set to  0.000000
2/19/10	5:52:29 PM	H2 MFC set to  0.000000
2/19/10	5:52:29 PM	BCl3 MFC set to  0.000000
2/19/10	5:52:29 PM	SiCl4 MFC set to  0.000000
2/19/10	5:52:29 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:52:29 PM	Tube furnace set to 0
2/19/10	5:52:43 PM	Program exited cleanly
2/19/10	5:52:45 PM	Program started normally
2/19/10	5:52:45 PM	Helium valve closed
2/19/10	5:52:45 PM	H2 valve closed
2/19/10	5:52:45 PM	BCl3 valve closed
2/19/10	5:52:45 PM	PH3 valve closed
2/19/10	5:52:45 PM	SiCl4 pre valve closed
2/19/10	5:52:45 PM	SiCl4 post valve closed
2/19/10	5:52:45 PM	Main Vac valve closed
2/19/10	5:52:45 PM	Bypass valve closed
2/19/10	5:52:45 PM	Bubbler valve closed
2/19/10	5:52:45 PM	Helium MFC set to  0.000000
2/19/10	5:52:45 PM	H2 MFC set to  0.000000
2/19/10	5:52:45 PM	BCl3 MFC set to  0.000000
2/19/10	5:52:45 PM	SiCl4 MFC set to  0.000000
2/19/10	5:52:45 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:52:45 PM	Tube furnace set to 0
2/19/10	5:53:07 PM	Bypass valve opened
2/19/10	5:53:08 PM	Bypass valve closed
2/19/10	5:53:09 PM	Main Vac valve opened
2/19/10	5:53:09 PM	Main Vac valve closed
2/19/10	5:53:11 PM	Program exited cleanly
2/19/10	5:54:25 PM	Program started normally
2/19/10	5:54:25 PM	Helium valve closed
2/19/10	5:54:25 PM	H2 valve closed
2/19/10	5:54:25 PM	BCl3 valve closed
2/19/10	5:54:25 PM	PH3 valve closed
2/19/10	5:54:25 PM	SiCl4 pre valve closed
2/19/10	5:54:25 PM	SiCl4 post valve closed
2/19/10	5:54:25 PM	Main Vac valve closed
2/19/10	5:54:25 PM	Bypass valve closed
2/19/10	5:54:25 PM	Bubbler valve closed
2/19/10	5:54:25 PM	Helium MFC set to  0.000000
2/19/10	5:54:25 PM	H2 MFC set to  0.000000
2/19/10	5:54:25 PM	BCl3 MFC set to  0.000000
2/19/10	5:54:25 PM	SiCl4 MFC set to  0.000000
2/19/10	5:54:25 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:54:25 PM	Tube furnace set to 0
2/19/10	5:54:28 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:55:28 PM	Program started after a nonstandard shutdown
2/19/10	5:55:28 PM	Helium valve closed
2/19/10	5:55:28 PM	H2 valve closed
2/19/10	5:55:28 PM	BCl3 valve closed
2/19/10	5:55:28 PM	PH3 valve closed
2/19/10	5:55:28 PM	SiCl4 pre valve closed
2/19/10	5:55:28 PM	SiCl4 post valve closed
2/19/10	5:55:28 PM	Main Vac valve closed
2/19/10	5:55:28 PM	Bypass valve closed
2/19/10	5:55:28 PM	Bubbler valve closed
2/19/10	5:55:28 PM	Helium MFC set to  0.000000
2/19/10	5:55:28 PM	H2 MFC set to  0.000000
2/19/10	5:55:28 PM	BCl3 MFC set to  0.000000
2/19/10	5:55:28 PM	SiCl4 MFC set to  0.000000
2/19/10	5:55:28 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:55:28 PM	Tube furnace set to 0
2/19/10	5:55:29 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:55:59 PM	Program started after a nonstandard shutdown
2/19/10	5:55:59 PM	Helium valve closed
2/19/10	5:55:59 PM	H2 valve closed
2/19/10	5:56:00 PM	BCl3 valve closed
2/19/10	5:56:00 PM	PH3 valve closed
2/19/10	5:56:00 PM	SiCl4 pre valve closed
2/19/10	5:56:00 PM	SiCl4 post valve closed
2/19/10	5:56:00 PM	Main Vac valve closed
2/19/10	5:56:00 PM	Bypass valve closed
2/19/10	5:56:00 PM	Bubbler valve closed
2/19/10	5:56:00 PM	Helium MFC set to  0.000000
2/19/10	5:56:00 PM	H2 MFC set to  0.000000
2/19/10	5:56:00 PM	BCl3 MFC set to  0.000000
2/19/10	5:56:00 PM	SiCl4 MFC set to  0.000000
2/19/10	5:56:00 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:56:00 PM	Tube furnace set to 0
2/19/10	5:56:03 PM	Program exited cleanly
2/19/10	5:56:09 PM	Program started normally
2/19/10	5:56:09 PM	Helium valve closed
2/19/10	5:56:09 PM	H2 valve closed
2/19/10	5:56:09 PM	BCl3 valve closed
2/19/10	5:56:09 PM	PH3 valve closed
2/19/10	5:56:09 PM	SiCl4 pre valve closed
2/19/10	5:56:09 PM	SiCl4 post valve closed
2/19/10	5:56:09 PM	Main Vac valve closed
2/19/10	5:56:09 PM	Bypass valve closed
2/19/10	5:56:09 PM	Bubbler valve closed
2/19/10	5:56:09 PM	Helium MFC set to  0.000000
2/19/10	5:56:09 PM	H2 MFC set to  0.000000
2/19/10	5:56:09 PM	BCl3 MFC set to  0.000000
2/19/10	5:56:09 PM	SiCl4 MFC set to  0.000000
2/19/10	5:56:09 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:56:09 PM	Tube furnace set to 0
2/19/10	5:56:12 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:56:49 PM	Recipe started at 5:56 PM
2/19/10	5:56:50 PM	There was an error trying to close the H2 valve.  It remains opened. 
2/19/10	5:56:56 PM	BCl3 valve closed
2/19/10	5:56:56 PM	PH3 valve closed
2/19/10	5:56:56 PM	SiCl4 pre valve closed
2/19/10	5:56:56 PM	SiCl4 post valve closed
2/19/10	5:56:56 PM	Main Vac valve closed
2/19/10	5:56:56 PM	Bypass valve closed
2/19/10	5:56:56 PM	Bubbler valve closed
2/19/10	5:56:56 PM	Helium valve opened
2/19/10	5:56:56 PM	Helium MFC set to  500.000000
2/19/10	5:56:56 PM	H2 MFC set to  0.000000
2/19/10	5:56:56 PM	BCl3 MFC set to  0.000000
2/19/10	5:56:56 PM	SiCl4 MFC set to  0.000000
2/19/10	5:56:56 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:56:56 PM	Tube furnace set to 0
2/19/10	5:56:58 PM	Run aborted at 5:56 PM
2/19/10	5:56:58 PM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:57:13 PM	Program exited cleanly
2/19/10	5:58:00 PM	Program started normally
2/19/10	5:58:01 PM	Helium valve closed
2/19/10	5:58:01 PM	H2 valve closed
2/19/10	5:58:01 PM	BCl3 valve closed
2/19/10	5:58:01 PM	PH3 valve closed
2/19/10	5:58:01 PM	SiCl4 pre valve closed
2/19/10	5:58:01 PM	SiCl4 post valve closed
2/19/10	5:58:01 PM	Main Vac valve closed
2/19/10	5:58:01 PM	Bypass valve closed
2/19/10	5:58:01 PM	Bubbler valve closed
2/19/10	5:58:01 PM	Helium MFC set to  0.000000
2/19/10	5:58:01 PM	H2 MFC set to  0.000000
2/19/10	5:58:01 PM	BCl3 MFC set to  0.000000
2/19/10	5:58:01 PM	SiCl4 MFC set to  0.000000
2/19/10	5:58:01 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:58:01 PM	Tube furnace set to 0
2/19/10	5:58:05 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:58:08 PM	Recipe started at 5:58 PM
2/19/10	5:58:08 PM	H2 valve closed
2/19/10	5:58:08 PM	BCl3 valve closed
2/19/10	5:58:08 PM	PH3 valve closed
2/19/10	5:58:08 PM	SiCl4 pre valve closed
2/19/10	5:58:08 PM	SiCl4 post valve closed
2/19/10	5:58:08 PM	Main Vac valve closed
2/19/10	5:58:08 PM	Bypass valve closed
2/19/10	5:58:08 PM	Bubbler valve closed
2/19/10	5:58:08 PM	Helium valve opened
2/19/10	5:58:08 PM	Helium MFC set to  500.000000
2/19/10	5:58:08 PM	H2 MFC set to  0.000000
2/19/10	5:58:08 PM	BCl3 MFC set to  0.000000
2/19/10	5:58:08 PM	SiCl4 MFC set to  0.000000
2/19/10	5:58:08 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:58:08 PM	Tube furnace set to 0
2/19/10	5:58:09 PM	Helium valve closed
2/19/10	5:58:09 PM	H2 valve closed
2/19/10	5:58:09 PM	BCl3 valve closed
2/19/10	5:58:09 PM	PH3 valve closed
2/19/10	5:58:09 PM	SiCl4 pre valve closed
2/19/10	5:58:09 PM	SiCl4 post valve closed
2/19/10	5:58:09 PM	Main Vac valve closed
2/19/10	5:58:09 PM	Bypass valve closed
2/19/10	5:58:09 PM	Bubbler valve closed
2/19/10	5:58:09 PM	Helium MFC set to  0.000000
2/19/10	5:58:09 PM	H2 MFC set to  0.000000
2/19/10	5:58:09 PM	BCl3 MFC set to  0.000000
2/19/10	5:58:09 PM	SiCl4 MFC set to  0.000000
2/19/10	5:58:09 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:58:09 PM	Tube furnace set to 0
2/19/10	5:58:09 PM	Run finished at 5:58 PM
2/19/10	5:58:09 PM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:58:14 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:58:18 PM	Recipe started at 5:58 PM
2/19/10	5:58:18 PM	H2 valve closed
2/19/10	5:58:18 PM	BCl3 valve closed
2/19/10	5:58:18 PM	PH3 valve closed
2/19/10	5:58:18 PM	SiCl4 pre valve closed
2/19/10	5:58:18 PM	SiCl4 post valve closed
2/19/10	5:58:18 PM	Main Vac valve closed
2/19/10	5:58:18 PM	Bypass valve closed
2/19/10	5:58:18 PM	Bubbler valve closed
2/19/10	5:58:18 PM	Helium valve opened
2/19/10	5:58:18 PM	Helium MFC set to  500.000000
2/19/10	5:58:18 PM	H2 MFC set to  0.000000
2/19/10	5:58:18 PM	BCl3 MFC set to  0.000000
2/19/10	5:58:18 PM	SiCl4 MFC set to  0.000000
2/19/10	5:58:18 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:58:18 PM	Tube furnace set to 0
2/19/10	5:58:18 PM	Helium valve closed
2/19/10	5:58:18 PM	H2 valve closed
2/19/10	5:58:18 PM	BCl3 valve closed
2/19/10	5:58:18 PM	PH3 valve closed
2/19/10	5:58:18 PM	SiCl4 pre valve closed
2/19/10	5:58:18 PM	SiCl4 post valve closed
2/19/10	5:58:18 PM	Main Vac valve closed
2/19/10	5:58:18 PM	Bypass valve closed
2/19/10	5:58:18 PM	Bubbler valve closed
2/19/10	5:58:18 PM	Helium MFC set to  0.000000
2/19/10	5:58:18 PM	H2 MFC set to  0.000000
2/19/10	5:58:18 PM	BCl3 MFC set to  0.000000
2/19/10	5:58:18 PM	SiCl4 MFC set to  0.000000
2/19/10	5:58:18 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:58:18 PM	Tube furnace set to 0
2/19/10	5:58:18 PM	Run finished at 5:58 PM
2/19/10	5:58:18 PM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:58:23 PM	Program exited cleanly
2/19/10	5:58:36 PM	Program started normally
2/19/10	5:58:36 PM	Helium valve closed
2/19/10	5:58:36 PM	H2 valve closed
2/19/10	5:58:36 PM	BCl3 valve closed
2/19/10	5:58:36 PM	PH3 valve closed
2/19/10	5:58:36 PM	SiCl4 pre valve closed
2/19/10	5:58:36 PM	SiCl4 post valve closed
2/19/10	5:58:36 PM	Main Vac valve closed
2/19/10	5:58:36 PM	Bypass valve closed
2/19/10	5:58:36 PM	Bubbler valve closed
2/19/10	5:58:36 PM	Helium MFC set to  0.000000
2/19/10	5:58:36 PM	H2 MFC set to  0.000000
2/19/10	5:58:36 PM	BCl3 MFC set to  0.000000
2/19/10	5:58:36 PM	SiCl4 MFC set to  0.000000
2/19/10	5:58:36 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:58:36 PM	Tube furnace set to 0
2/19/10	5:58:37 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:58:41 PM	Recipe started at 5:58 PM
2/19/10	5:58:41 PM	H2 valve closed
2/19/10	5:58:41 PM	BCl3 valve closed
2/19/10	5:58:41 PM	PH3 valve closed
2/19/10	5:58:41 PM	SiCl4 pre valve closed
2/19/10	5:58:41 PM	SiCl4 post valve closed
2/19/10	5:58:41 PM	Main Vac valve closed
2/19/10	5:58:41 PM	Bypass valve closed
2/19/10	5:58:41 PM	Bubbler valve closed
2/19/10	5:58:41 PM	Helium valve opened
2/19/10	5:58:41 PM	Helium MFC set to  500.000000
2/19/10	5:58:41 PM	H2 MFC set to  0.000000
2/19/10	5:58:41 PM	BCl3 MFC set to  0.000000
2/19/10	5:58:41 PM	SiCl4 MFC set to  0.000000
2/19/10	5:58:41 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:58:41 PM	Tube furnace set to 0
2/19/10	5:58:42 PM	Helium valve closed
2/19/10	5:58:42 PM	H2 valve closed
2/19/10	5:58:42 PM	BCl3 valve closed
2/19/10	5:58:42 PM	PH3 valve closed
2/19/10	5:58:42 PM	SiCl4 pre valve closed
2/19/10	5:58:42 PM	SiCl4 post valve closed
2/19/10	5:58:42 PM	Main Vac valve closed
2/19/10	5:58:42 PM	Bypass valve closed
2/19/10	5:58:42 PM	Bubbler valve closed
2/19/10	5:58:42 PM	Helium MFC set to  0.000000
2/19/10	5:58:42 PM	H2 MFC set to  0.000000
2/19/10	5:58:42 PM	BCl3 MFC set to  0.000000
2/19/10	5:58:42 PM	SiCl4 MFC set to  0.000000
2/19/10	5:58:42 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:58:42 PM	Tube furnace set to 0
2/19/10	5:58:43 PM	Run finished at 5:58 PM
2/19/10	5:58:43 PM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:58:50 PM	Program exited cleanly
2/19/10	5:59:02 PM	Program started normally
2/19/10	5:59:02 PM	Helium valve closed
2/19/10	5:59:02 PM	H2 valve closed
2/19/10	5:59:02 PM	BCl3 valve closed
2/19/10	5:59:02 PM	PH3 valve closed
2/19/10	5:59:02 PM	SiCl4 pre valve closed
2/19/10	5:59:02 PM	SiCl4 post valve closed
2/19/10	5:59:02 PM	Main Vac valve closed
2/19/10	5:59:02 PM	Bypass valve closed
2/19/10	5:59:02 PM	Bubbler valve closed
2/19/10	5:59:02 PM	Helium MFC set to  0.000000
2/19/10	5:59:02 PM	H2 MFC set to  0.000000
2/19/10	5:59:02 PM	BCl3 MFC set to  0.000000
2/19/10	5:59:02 PM	SiCl4 MFC set to  0.000000
2/19/10	5:59:02 PM	Bypass solenoid MFC set to  760.000000
2/19/10	5:59:02 PM	Tube furnace set to 0
2/19/10	5:59:10 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	5:59:14 PM	Recipe started at 5:59 PM
2/19/10	5:59:14 PM	H2 valve closed
2/19/10	5:59:14 PM	BCl3 valve closed
2/19/10	5:59:14 PM	PH3 valve closed
2/19/10	5:59:14 PM	SiCl4 pre valve closed
2/19/10	5:59:14 PM	SiCl4 post valve closed
2/19/10	5:59:14 PM	Main Vac valve closed
2/19/10	5:59:14 PM	Bypass valve closed
2/19/10	5:59:14 PM	Bubbler valve closed
2/19/10	5:59:14 PM	Helium valve opened
2/19/10	5:59:14 PM	Helium MFC set to  500.000000
2/19/10	5:59:14 PM	H2 MFC set to  0.000000
2/19/10	5:59:14 PM	BCl3 MFC set to  0.000000
2/19/10	5:59:14 PM	SiCl4 MFC set to  0.000000
2/19/10	5:59:14 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:59:14 PM	Tube furnace set to 0
2/19/10	5:59:15 PM	Helium valve closed
2/19/10	5:59:15 PM	H2 valve closed
2/19/10	5:59:15 PM	BCl3 valve closed
2/19/10	5:59:15 PM	PH3 valve closed
2/19/10	5:59:15 PM	SiCl4 pre valve closed
2/19/10	5:59:15 PM	SiCl4 post valve closed
2/19/10	5:59:15 PM	Main Vac valve closed
2/19/10	5:59:15 PM	Bypass valve closed
2/19/10	5:59:15 PM	Bubbler valve closed
2/19/10	5:59:15 PM	Helium MFC set to  0.000000
2/19/10	5:59:15 PM	H2 MFC set to  0.000000
2/19/10	5:59:15 PM	BCl3 MFC set to  0.000000
2/19/10	5:59:15 PM	SiCl4 MFC set to  0.000000
2/19/10	5:59:15 PM	Bypass solenoid MFC set to  0.000000
2/19/10	5:59:15 PM	Tube furnace set to 0
2/19/10	5:59:15 PM	Run finished at 5:59 PM
2/19/10	5:59:15 PM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	6:00:08 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	6:00:11 PM	Recipe started at 6:00 PM
2/19/10	6:00:11 PM	H2 valve closed
2/19/10	6:00:11 PM	BCl3 valve closed
2/19/10	6:00:11 PM	PH3 valve closed
2/19/10	6:00:11 PM	SiCl4 pre valve closed
2/19/10	6:00:11 PM	SiCl4 post valve closed
2/19/10	6:00:11 PM	Main Vac valve closed
2/19/10	6:00:11 PM	Bypass valve closed
2/19/10	6:00:11 PM	Bubbler valve closed
2/19/10	6:00:11 PM	Helium valve opened
2/19/10	6:00:11 PM	Helium MFC set to  500.000000
2/19/10	6:00:11 PM	H2 MFC set to  0.000000
2/19/10	6:00:11 PM	BCl3 MFC set to  0.000000
2/19/10	6:00:11 PM	SiCl4 MFC set to  0.000000
2/19/10	6:00:11 PM	Bypass solenoid MFC set to  0.000000
2/19/10	6:00:11 PM	Tube furnace set to 0
2/19/10	6:00:14 PM	Helium valve closed
2/19/10	6:00:14 PM	H2 valve closed
2/19/10	6:00:14 PM	BCl3 valve closed
2/19/10	6:00:14 PM	PH3 valve closed
2/19/10	6:00:14 PM	SiCl4 pre valve closed
2/19/10	6:00:14 PM	SiCl4 post valve closed
2/19/10	6:00:14 PM	Main Vac valve closed
2/19/10	6:00:14 PM	Bypass valve closed
2/19/10	6:00:14 PM	Bubbler valve closed
2/19/10	6:00:14 PM	Helium MFC set to  0.000000
2/19/10	6:00:14 PM	H2 MFC set to  0.000000
2/19/10	6:00:14 PM	BCl3 MFC set to  0.000000
2/19/10	6:00:14 PM	SiCl4 MFC set to  0.000000
2/19/10	6:00:14 PM	Bypass solenoid MFC set to  0.000000
2/19/10	6:00:14 PM	Tube furnace set to 0
2/19/10	6:00:15 PM	Run finished at 6:00 PM
2/19/10	6:00:15 PM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	6:00:20 PM	Program exited cleanly
2/19/10	6:02:02 PM	Program started normally
2/19/10	6:02:02 PM	Helium valve closed
2/19/10	6:02:02 PM	H2 valve closed
2/19/10	6:02:02 PM	BCl3 valve closed
2/19/10	6:02:02 PM	PH3 valve closed
2/19/10	6:02:02 PM	SiCl4 pre valve closed
2/19/10	6:02:02 PM	SiCl4 post valve closed
2/19/10	6:02:02 PM	Main Vac valve closed
2/19/10	6:02:02 PM	Bypass valve closed
2/19/10	6:02:02 PM	Bubbler valve closed
2/19/10	6:02:02 PM	Helium MFC set to  0.000000
2/19/10	6:02:02 PM	H2 MFC set to  0.000000
2/19/10	6:02:02 PM	BCl3 MFC set to  0.000000
2/19/10	6:02:02 PM	SiCl4 MFC set to  0.000000
2/19/10	6:02:02 PM	Bypass solenoid MFC set to  760.000000
2/19/10	6:02:02 PM	Tube furnace set to 0
2/19/10	6:02:04 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:pumpdown.xml
2/19/10	6:02:07 PM	Recipe started at 6:02 PM
2/19/10	6:02:07 PM	Helium valve closed
2/19/10	6:02:07 PM	H2 valve closed
2/19/10	6:02:07 PM	BCl3 valve closed
2/19/10	6:02:07 PM	PH3 valve closed
2/19/10	6:02:07 PM	SiCl4 pre valve closed
2/19/10	6:02:07 PM	SiCl4 post valve closed
2/19/10	6:02:07 PM	Main Vac valve closed
2/19/10	6:02:07 PM	Bubbler valve closed
2/19/10	6:02:07 PM	Bypass valve opened
2/19/10	6:02:07 PM	Helium MFC set to  0.000000
2/19/10	6:02:07 PM	H2 MFC set to  0.000000
2/19/10	6:02:07 PM	BCl3 MFC set to  0.000000
2/19/10	6:02:07 PM	SiCl4 MFC set to  0.000000
2/19/10	6:02:07 PM	Bypass solenoid MFC set to  0.000000
2/19/10	6:02:07 PM	Tube furnace set to 0
2/19/10	6:02:08 PM	Helium valve closed
2/19/10	6:02:08 PM	H2 valve closed
2/19/10	6:02:08 PM	BCl3 valve closed
2/19/10	6:02:08 PM	PH3 valve closed
2/19/10	6:02:08 PM	SiCl4 pre valve closed
2/19/10	6:02:08 PM	SiCl4 post valve closed
2/19/10	6:02:08 PM	Bubbler valve closed
2/19/10	6:02:08 PM	Main Vac valve opened
2/19/10	6:02:08 PM	Bypass valve opened
2/19/10	6:02:08 PM	Helium MFC set to  0.000000
2/19/10	6:02:08 PM	H2 MFC set to  0.000000
2/19/10	6:02:08 PM	BCl3 MFC set to  0.000000
2/19/10	6:02:08 PM	SiCl4 MFC set to  0.000000
2/19/10	6:02:08 PM	Bypass solenoid MFC set to  0.000000
2/19/10	6:02:08 PM	Tube furnace set to 0
2/19/10	6:02:08 PM	Run finished at 6:02 PM
2/19/10	6:02:09 PM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:pumpdown.xml
2/19/10	6:02:13 PM	Program exited cleanly
2/19/10	6:02:28 PM	Program started normally
2/19/10	6:02:28 PM	Helium valve closed
2/19/10	6:02:28 PM	H2 valve closed
2/19/10	6:02:28 PM	BCl3 valve closed
2/19/10	6:02:28 PM	PH3 valve closed
2/19/10	6:02:28 PM	SiCl4 pre valve closed
2/19/10	6:02:28 PM	SiCl4 post valve closed
2/19/10	6:02:28 PM	Main Vac valve closed
2/19/10	6:02:28 PM	Bypass valve closed
2/19/10	6:02:28 PM	Bubbler valve closed
2/19/10	6:02:28 PM	Helium MFC set to  0.000000
2/19/10	6:02:28 PM	H2 MFC set to  0.000000
2/19/10	6:02:28 PM	BCl3 MFC set to  0.000000
2/19/10	6:02:28 PM	SiCl4 MFC set to  0.000000
2/19/10	6:02:28 PM	Bypass solenoid MFC set to  760.000000
2/19/10	6:02:28 PM	Tube furnace set to 0
2/19/10	6:02:30 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:pumpdown.xml
2/19/10	6:02:34 PM	Recipe started at 6:02 PM
2/19/10	6:02:34 PM	Helium valve closed
2/19/10	6:02:34 PM	H2 valve closed
2/19/10	6:02:34 PM	BCl3 valve closed
2/19/10	6:02:34 PM	PH3 valve closed
2/19/10	6:02:34 PM	SiCl4 pre valve closed
2/19/10	6:02:34 PM	SiCl4 post valve closed
2/19/10	6:02:34 PM	Main Vac valve closed
2/19/10	6:02:34 PM	Bubbler valve closed
2/19/10	6:02:34 PM	Bypass valve opened
2/19/10	6:02:34 PM	Helium MFC set to  0.000000
2/19/10	6:02:34 PM	H2 MFC set to  0.000000
2/19/10	6:02:34 PM	BCl3 MFC set to  0.000000
2/19/10	6:02:34 PM	SiCl4 MFC set to  0.000000
2/19/10	6:02:34 PM	Bypass solenoid MFC set to  0.000000
2/19/10	6:02:34 PM	Tube furnace set to 0
2/19/10	6:02:41 PM	Helium valve closed
2/19/10	6:02:41 PM	H2 valve closed
2/19/10	6:02:41 PM	BCl3 valve closed
2/19/10	6:02:41 PM	PH3 valve closed
2/19/10	6:02:41 PM	SiCl4 pre valve closed
2/19/10	6:02:41 PM	SiCl4 post valve closed
2/19/10	6:02:41 PM	Bubbler valve closed
2/19/10	6:02:41 PM	Main Vac valve opened
2/19/10	6:02:41 PM	Bypass valve opened
2/19/10	6:02:41 PM	Helium MFC set to  0.000000
2/19/10	6:02:41 PM	H2 MFC set to  0.000000
2/19/10	6:02:41 PM	BCl3 MFC set to  0.000000
2/19/10	6:02:41 PM	SiCl4 MFC set to  0.000000
2/19/10	6:02:41 PM	Bypass solenoid MFC set to  0.000000
2/19/10	6:02:41 PM	Tube furnace set to 0
2/19/10	6:02:41 PM	Run finished at 6:02 PM
2/19/10	6:02:41 PM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:pumpdown.xml
2/19/10	6:02:55 PM	Executing task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	6:02:59 PM	Recipe started at 6:02 PM
2/19/10	6:02:59 PM	H2 valve closed
2/19/10	6:02:59 PM	BCl3 valve closed
2/19/10	6:02:59 PM	PH3 valve closed
2/19/10	6:02:59 PM	SiCl4 pre valve closed
2/19/10	6:02:59 PM	SiCl4 post valve closed
2/19/10	6:02:59 PM	Main Vac valve closed
2/19/10	6:02:59 PM	Bypass valve closed
2/19/10	6:02:59 PM	Bubbler valve closed
2/19/10	6:02:59 PM	Helium valve opened
2/19/10	6:02:59 PM	Helium MFC set to  500.000000
2/19/10	6:02:59 PM	H2 MFC set to  0.000000
2/19/10	6:02:59 PM	BCl3 MFC set to  0.000000
2/19/10	6:02:59 PM	SiCl4 MFC set to  0.000000
2/19/10	6:02:59 PM	Bypass solenoid MFC set to  0.000000
2/19/10	6:02:59 PM	Tube furnace set to 0
2/19/10	6:03:04 PM	Helium valve closed
2/19/10	6:03:04 PM	H2 valve closed
2/19/10	6:03:04 PM	BCl3 valve closed
2/19/10	6:03:04 PM	PH3 valve closed
2/19/10	6:03:04 PM	SiCl4 pre valve closed
2/19/10	6:03:04 PM	SiCl4 post valve closed
2/19/10	6:03:04 PM	Main Vac valve closed
2/19/10	6:03:04 PM	Bypass valve closed
2/19/10	6:03:04 PM	Bubbler valve closed
2/19/10	6:03:04 PM	Helium MFC set to  0.000000
2/19/10	6:03:04 PM	H2 MFC set to  0.000000
2/19/10	6:03:04 PM	BCl3 MFC set to  0.000000
2/19/10	6:03:04 PM	SiCl4 MFC set to  0.000000
2/19/10	6:03:04 PM	Bypass solenoid MFC set to  0.000000
2/19/10	6:03:04 PM	Tube furnace set to 0
2/19/10	6:03:05 PM	Run finished at 6:03 PM
2/19/10	6:03:05 PM	Completed task MacintoshHD:Users:grimm:Documents:postdoc research:instrument modification:Das Bierman:CVD_Control 2010-02-17:tasks:vent.xml
2/19/10	6:03:10 PM	Program exited cleanly
2/19/10	11:00:07 PM	Program started normally
2/19/10	11:00:07 PM	Helium valve closed
2/19/10	11:00:07 PM	H2 valve closed
2/19/10	11:00:07 PM	BCl3 valve closed
2/19/10	11:00:07 PM	PH3 valve closed
2/19/10	11:00:07 PM	SiCl4 pre valve closed
2/19/10	11:00:07 PM	SiCl4 post valve closed
2/19/10	11:00:07 PM	Main Vac valve closed
2/19/10	11:00:07 PM	Bypass valve closed
2/19/10	11:00:07 PM	Bubbler valve closed
2/19/10	11:00:07 PM	Helium MFC set to  0.000000
2/19/10	11:00:07 PM	H2 MFC set to  0.000000
2/19/10	11:00:07 PM	BCl3 MFC set to  0.000000
2/19/10	11:00:07 PM	SiCl4 MFC set to  0.000000
2/19/10	11:00:07 PM	Bypass solenoid MFC set to  760.000000
2/19/10	11:00:07 PM	Tube furnace set to 0
2/19/10	11:01:05 PM	Helium valve opened
2/19/10	11:01:05 PM	Helium valve closed
2/19/10	11:01:06 PM	H2 valve opened
2/19/10	11:01:07 PM	H2 valve closed
2/19/10	11:01:08 PM	BCl3 valve opened
2/19/10	11:01:08 PM	BCl3 valve closed
2/19/10	11:01:31 PM	BCl3 valve opened
2/19/10	11:01:32 PM	BCl3 valve closed
2/19/10	11:01:35 PM	Main Vac valve opened
2/19/10	11:01:36 PM	Bypass valve opened
2/19/10	11:02:04 PM	Main Vac valve closed
2/19/10	11:02:05 PM	Bypass valve closed
2/19/10	11:02:23 PM	Helium valve opened
2/19/10	11:02:23 PM	Helium valve closed
2/19/10	11:06:57 PM	Recipe started at 11:06 PM
2/19/10	11:06:57 PM	Helium valve closed
2/19/10	11:06:57 PM	H2 valve closed
2/19/10	11:06:57 PM	BCl3 valve closed
2/19/10	11:06:57 PM	PH3 valve closed
2/19/10	11:06:57 PM	SiCl4 pre valve closed
2/19/10	11:06:57 PM	SiCl4 post valve closed
2/19/10	11:06:57 PM	Bubbler valve closed
2/19/10	11:06:57 PM	Main Vac valve opened
2/19/10	11:06:57 PM	Bypass valve opened
2/19/10	11:06:57 PM	Helium MFC set to  0.000000
2/19/10	11:06:57 PM	H2 MFC set to  0.000000
2/19/10	11:06:57 PM	BCl3 MFC set to  0.000000
2/19/10	11:06:57 PM	SiCl4 MFC set to  20.000000
2/19/10	11:06:57 PM	Bypass solenoid MFC set to  0.000000
2/19/10	11:06:57 PM	Tube furnace set to 0
2/19/10	11:07:03 PM	H2 valve closed
2/19/10	11:07:03 PM	BCl3 valve closed
2/19/10	11:07:03 PM	PH3 valve closed
2/19/10	11:07:03 PM	SiCl4 pre valve closed
2/19/10	11:07:03 PM	SiCl4 post valve closed
2/19/10	11:07:03 PM	Main Vac valve closed
2/19/10	11:07:03 PM	Bypass valve closed
2/19/10	11:07:03 PM	Bubbler valve closed
2/19/10	11:07:03 PM	Helium valve opened
2/19/10	11:07:03 PM	Helium MFC set to  0.000000
2/19/10	11:07:03 PM	H2 MFC set to  0.000000
2/19/10	11:07:03 PM	BCl3 MFC set to  0.000000
2/19/10	11:07:03 PM	SiCl4 MFC set to  0.000000
2/19/10	11:07:03 PM	Bypass solenoid MFC set to  0.000000
2/19/10	11:07:03 PM	Tube furnace set to 0
2/19/10	11:07:07 PM	H2 valve closed
2/19/10	11:07:07 PM	BCl3 valve closed
2/19/10	11:07:07 PM	PH3 valve closed
2/19/10	11:07:07 PM	Main Vac valve closed
2/19/10	11:07:07 PM	Bypass valve closed
2/19/10	11:07:07 PM	Bubbler valve closed
2/19/10	11:07:07 PM	Helium valve opened
2/19/10	11:07:07 PM	SiCl4 pre valve opened
2/19/10	11:07:07 PM	SiCl4 post valve opened
2/19/10	11:07:07 PM	Helium MFC set to  0.000000
2/19/10	11:07:07 PM	H2 MFC set to  0.000000
2/19/10	11:07:07 PM	BCl3 MFC set to  0.000000
2/19/10	11:07:07 PM	SiCl4 MFC set to  0.000000
2/19/10	11:07:07 PM	Bypass solenoid MFC set to  0.000000
2/19/10	11:07:07 PM	Tube furnace set to 0
2/19/10	11:07:07 PM	Run finished at 11:07 PM
2/19/10	11:07:57 PM	Program exited cleanly
